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US 10,470,284 B2Granted
Plasma source
AssigneeNissin Ion Equipment Co., Ltd.
InventorsSuguru Itoi, Hideki Fujita
Life of this patent
Estimating the term…
Abstract
A plasma source is provided. The plasma source includes a chamber body inside which plasma is generated, a first mirror magnet, a second mirror magnet, and a cusp magnet provided around the chamber body and spaced apart in a axial direction thereof, each comprising permanent magnets radially spaced apart from each other to form spaces between adjacent permanent magnets thereof; and a cooling medium flow passage provided in the spaces that passes a cooling medium for cooling the chamber body.
Claims15
A plasma source comprising:
- a chamber body inside which plasma is generated;
- a first mirror magnet and a second mirror magnet disposed around the chamber body at positions spaced apart from each other along a first direction;
- and
- a cusp magnet disposed around the chamber body at a position between the first and second mirror magnets in the first direction, wherein:
- the first mirror magnet comprises a plurality of first permanent magnets which are arranged around the chamber body in a plane perpendicular to the first direction with a first space between adjacent ones of the first permanent magnets, each of the first permanent magnets having a first polarity on a chamber body side of the first permanent magnet,
- the second mirror magnet comprises a plurality of second permanent magnets which are arranged around the chamber body in the plane perpendicular to the first direction with a second space between adjacent ones of the second permanent magnets, each of the second permanent magnets having a second polarity on a chamber body side of the second permanent magnet;
- and
- the cusp magnet comprises a plurality of cusp permanent magnets which are arranged around the chamber body in the plane perpendicular to the first direction with a cusp space between adjacent ones of the cusp permanent magnets, the cusp permanent magnets having polarities that alternate around the chamber body between the first polarity and a second polarity;
- wherein the second polarity is different from the first polarity;
- a plurality of cooling medium flow passage provided in the first space, the second space, and the cusp space.
7 more elements
A plasma source comprising:
- a chamber body inside which plasma is generated;
- a first mirror magnet, a second mirror magnet, and a cusp magnet provided around the chamber body and spaced apart in an axial direction thereof, each comprising a plurality of permanent magnets radially spaced apart from each other to form spaces between adjacent permanent magnets thereof;
- a plurality of cooling medium flow passages provided in the spaces that passes a cooling medium for cooling the chamber body;
- a plurality of inflow passages formed at a first end of the chamber body in the axial direction and connected to cooling medium flow passages provided in a portion the spaces of the first mirror magnet, the second mirror magnet, and the cusp magnet;
- a plurality of outflow passages formed at the first end and connected to cooling medium flow passages provided in a remaining portion of the spaces of the first mirror magnet, the second mirror magnet, and the cusp magnet;
- and
- a turnaround passage formed at a second end of the chamber body opposite to the first end and connected to the cooling medium flow passages provided in both the portion and the remaining portion of the spaces.
4 more elements
Dependencies are inferred from the claim text.