Scanning exposure device

A scanning exposure device, comprising:

• a stage that supports a substrate, wherein a space is provided between a stage surface and the substrate;
• a light source unit that radiates light to a light irradiation area that extends in one direction above the substrate;
• and
• a scanning mechanism that comprises a rail and moves one or both of the stage and the light source unit relatively on the rail in a scanning direction that intersects the one direction,
• wherein the scanning mechanism has an acceleration zone from a position in which the stage and the light source unit are at a standstill to a position in which the substrate supported by the stage enters the light irradiation area,
• wherein the stage comprises a light shielding member that covers the space between the stage surface and the substrate at an end part of the stage, and
• wherein the light source unit radiates an ultraviolet ray.

A scanning exposure device, comprising:

• a stage that supports a substrate, wherein a space is provided between a stage surface and the substrate;
• a light source unit that radiates light to a light irradiation area that extends in one direction above the substrate;
• and
• a scanning mechanism that comprises a rail and moves one or both of the stage and the light source unit relatively on the rail in a scanning direction that intersects the one direction,
• wherein the scanning mechanism has an acceleration zone from a position in which the stage and the light source unit are at a standstill to a position in which the substrate supported by the stage enters the light irradiation area,
• wherein the stage comprises a light shielding member that covers the space between the stage surface and the substrate at an end part of the stage,
• wherein the light source unit radiates an ultraviolet ray, and
• wherein a photo alignment material layer is formed on the substrate.