# US 10,468,228 B2 · Charged particle beam apparatus

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- Number: US 10,468,228 B2
- Document ID: US10468228B2
- Status: Granted
- Kind: B2
- Application number: 15/936,174
- Filed: 2018-03-26
- Published: 2018-10-04
- Granted: 2019-11-05
- Earliest claimed: 2017-03-28
- Assignees: Hitachi High-Tech Science Corporation
- Applicants: Hitachi High-Tech Science Corporation
- Inventors: Masakatsu Hasuda
- Web page: https://patentgrep.com/patent/US10468228B2

## CPC

- H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
- H01J 37/3056: {for microworking, e. g. etching of gratings or trimming of electrical components}
- H01J 37/317: for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation (H01J37/36 takes precedence)
- H01J 2237/20207: Tilt
- H01J 2237/20214: Rotation
- H01J 2237/20242: Eucentric movement
- H01J 2237/31745: for preparing specimen to be viewed in microscopes or analyzed in microanalysers
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A charged particle beam apparatus includes a charged particle beam column for irradiating a sample with a charged particle beam, and a sample stage unit for moving the sample relative to the charged particle beam column. The sample stage unit includes a rotary stage section having a base portion and a rotary mover rotatable about a rotary axis relative to the base portion. A rotary connector is disposed coaxially with and rotatable about the rotary axis and fitted between the base portion and the rotary mover for electrically connecting wirings between relatively rotating elements. A connection electrode is disposed on the sample stage unit in electrical connection with the rotary connector. In the charged particle beam apparatus, the sample is able to be rapidly placed and replaced.

## Claims

### Claim 1

A charged particle beam apparatus comprising:
a charged particle beam column that irradiates a sample with a charged particle beam;
a sample stage unit that moves the sample relative to the charged particle beam column, the sample stage unit including a rotary stage section having a base portion and a rotary mover rotatable about a rotary axis relative to the base portion;
a rotary connector disposed coaxially with and rotatable about the rotary axis and fitted between the base portion and the rotary mover for electrically connecting wirings between relatively rotating elements; and
a first connection electrode disposed on the sample stage unit in electrical connection with the rotary connector.

### Claim 2 (depends on 1)

The charged particle beam apparatus according to claim 1, further comprising:
a sample holder detachably disposed on the sample stage unit, the sample holder having a second connection electrode detachably connectable to the first connection electrode, a sample holding portion for holding the sample, and a holder-side moving stage section that moves the sample holding portion; and
a sample holder controller that transmits a control signal to the sample holder via the rotary connector when the second connection electrode of the sample holder is electrically connected to the first connection electrode.

### Claim 3 (depends on 2)

The charged particle beam apparatus according to claim 2, wherein the holder-side moving stage section includes a 2-axis tilting stage section rotatable about a first axis and a second axis orthogonal to the first axis.

### Claim 4 (depends on 3)

The charged particle beam apparatus according to claim 3, wherein the sample stage unit includes a holder for lock member locking a position of the sample holder with the second connection electrode of the sample holder press-connected to the first connection electrode.

### Claim 5 (depends on 4)

The charged particle beam apparatus according to claim 4, wherein a plurality of charged particle beam columns are provided.

### Claim 6 (depends on 3)

The charged particle beam apparatus according to claim 3, wherein a plurality of charged particle beam columns are provided.

### Claim 7 (depends on 2)

The charged particle beam apparatus according to claim 2, wherein the sample stage unit includes a holder lock member for locking a position of the sample holder with the second connection electrode of the sample holder press-connected to the first connection electrode.

### Claim 8 (depends on 7)

The charged particle beam apparatus according to claim 7, wherein a plurality of charged particle beam columns are provided.

### Claim 9 (depends on 2)

The charged particle beam apparatus according to claim 2, wherein a plurality of charged particle beam columns are provided.

### Claim 10 (depends on 1)

The charged particle beam apparatus according to claim 1, wherein a plurality of charged particle beam columns are provided.