Extraction apparatus and system for high throughput ion beam processing
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsCostel Biloiu, Jon Ballou, James P. Buonodono
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Abstract
In one embodiment, an ion extraction optics for extracting a plurality of ion beams is provided. The ion extraction optics may include, an extraction plate, the extraction plate defining a cut-out region, the cut-out region being elongated along a first direction. The extraction apparatus may include a slidable insert, the slidable insert disposed to overlap the cut-out region, and slidably movable with respect to the extraction plate, along the first direction, wherein the slidable insert and cut-out region define a first aperture and a second aperture.
Claims19
An ion extraction optics for extracting a plurality of ion beams, comprising:
- an extraction plate, the extraction plate defining a cut-out region, the cut-out region being elongated along a first direction;
- and
- a slidable insert, the slidable insert disposed to overlap the cut-out region, and slidably movable with respect to the extraction plate, along the first direction, wherein the slidable insert and cut-out region define a first aperture and a second aperture.
A processing apparatus, comprising:
- a plasma chamber disposed to contain a plasma;
- an extraction plate, disposed along a side of the plasma chamber, the extraction plate defining a cut-out region;
- a slidable insert, the slidable insert disposed to overlap the cut-out region, the slidable insert being elongated along a first direction and slidably movable along the first direction, wherein the slidable insert and cut-out region define a first aperture and a second aperture;
- a first beam blocker, disposed to overlap the first aperture, wherein the first beam blocker and the first aperture define a first extraction slit and a second extraction slit;
- and
- a second beam blocker, disposed to overlap the second aperture, wherein the second beam blocker and the second aperture define a third extraction slit and a fourth extraction slit.
An ion extraction optics for extracting a plurality of ion beams, comprising:
- an extraction plate, the extraction plate defining a cut-out region, the cut-out region being elongated along a first direction;
- and
- N slidable inserts, the N slidable inserts disposed to overlap the cut-out region, and slidably movable with respect to the extraction plate, along the first direction, wherein the N slidable inserts define N+1 extraction apertures, within the cut-out region, wherein N is an integer.
Dependencies are inferred from the claim text.