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US 10,468,221 B2Granted
Shadow frame with sides having a varied profile for improved deposition uniformity
AssigneeApplied Materials, Inc.
InventorsGaku Furuta, Soo Young Choi, Yi Cui, Robin L. Tiner, Jinhyun Cho, Jiarui Wang, Suhail Anwar
Life of this patent
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Abstract
Embodiments of the present disclosure generally relates a shadow frame including two opposing major side frame members adjacent to two opposing minor side frame members coupled together with a corner bracket, wherein the corner bracket includes a corner inlay having legs that extend in directions generally orthogonal to each other.
Claims20
A shadow frame, comprising:
- two opposing major side frame members adjacent to two opposing minor side frame members coupled together with a corner bracket at intersections therebetween, wherein each corner bracket includes a corner inlay having legs that extend in directions generally orthogonal to each other.
A shadow frame, comprising:
- two opposing major side frame members adjacent to two opposing minor side frame members coupled together with a corner bracket at a coupling interface, wherein each corner bracket includes a corner inlay having legs that extend in directions generally orthogonal to each other, and wherein each corner bracket includes a rounded corner.
A shadow frame, comprising:
- two opposing major side frame members adjacent to two opposing minor side frame members coupled together with a corner bracket at a coupling interface comprising a recessed area, wherein:
- each corner bracket includes a rounded corner and a corner inlay having legs that extend in directions generally orthogonal to each other;
- the corner inlay includes a planar upper surface and a sloped planar surface that is angled from a plane of the planar upper surface;
- and
- a notch formed at a center of the recessed area.
2 more elements
Dependencies are inferred from the claim text.