Actuator support structure and pump device
AssigneeMurata Manufacturing Co., Ltd.
InventorsAtsuhiko Hirata, Yukiharu Kodama, Kenta Omori
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AssigneeMurata Manufacturing Co., Ltd.
InventorsAtsuhiko Hirata, Yukiharu Kodama, Kenta Omori
Estimating the term…
A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.
An actuator structure comprising:
A pump device comprising:
Dependencies are inferred from the claim text.