# US 10,455,680 B2 · Method and apparatus for purifying target material for EUV light source > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,455,680 B2 - Document ID: US10455680B2 - Status: Granted - Kind: B2 - Application number: 15/057,086 - Filed: 2016-02-29 - Published: 2017-08-31 - Granted: 2019-10-22 - Earliest claimed: 2016-02-29 - Assignees: ASML Netherlands B.V. - Applicants: ASML Netherlands B.V. - Inventors: Georgiy Vaschenko; Peter Baumgart; Chirag Rajyaguru; Benjamin Sams; Armin Ridinger; Janine Kardokus - Web page: https://patentgrep.com/patent/US10455680B2 ## CPC - H05G 2/002: {Supply of the plasma generating material} - C22B 9/04: Refining by applying a vacuum - C22B 25/08: Refining - F27B 17/00: Furnaces of a kind not covered by any of groups F27B1/00 - F27B15/00 (structural combinations of furnaces F27B19/02) - F27B 17/02: specially designed for laboratory use - H05G: X-RAY TECHNIQUE (investigating or analysing materials by the use of X-rays G01N23/00; apparatus for X-ray photography G03B42/02; X-ray tubes H01J35/00; TV systems having X-ray input H04N5/321) - C22B: PRODUCTION AND REFINING OF METALS (electrolytic C25); PRETREATMENT OF RAW MATERIALS - F27B: FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS ## Abstract A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described. ## Claims ### Claim 1 A system, comprising: a furnace having a central region defined therein and at least one heater configured to heat the central region in a substantially uniform manner; a vessel having an open end for loading a target material, such that when inserted in the central region of the furnace, the open end of the vessel is located outside of the furnace; a crucible having an open end disposed within the vessel, the crucible being disposed within the vessel such that the open end of the crucible faces the open end of the vessel; a closure device covering the open end of the vessel, the closure device configured to form a seal having vacuum and pressure capability; a gas input tube having a first end located outside the vessel and a second end located inside the vessel, the second end of the gas input tube being positioned such that an input gas flowing into the vessel through the input tube is directed into the crucible; a gas exhaust tube having a first end located outside the vessel and a second end in flow communication with an inside of the vessel; a vacuum port having a first end located outside the vessel and a second end in flow communication with the inside of the vessel; a gas supply network coupled in flow communication with the first end of the gas input tube; a gas exhaust network coupled in flow communication with the first end of the gas exhaust tube; and a vacuum network coupled in flow communication with the first end of the vacuum port. ### Claim 2 (depends on 1) The system of claim 1, wherein the vessel is a metal vessel. ### Claim 3 (depends on 2) The system of claim 2, wherein the metal vessel is comprised of stainless steel or an alloy steel. ### Claim 4 (depends on 2) The system of claim 2, wherein an outer surface of the vessel is coated with an oxidation-resistant material. ### Claim 5 (depends on 1) The system of claim 1, wherein the gas supply network comprises a gas supply containing hydrogen and a gas purifier. ### Claim 6 (depends on 5) The system of claim 5, wherein the gas supply contains a gas mixture of argon and hydrogen. ### Claim 7 (depends on 6) The system of claim 6, wherein the gas mixture of argon and hydrogen includes up to 2.93 molar % hydrogen and the balance substantially argon. ### Claim 8 (depends on 1) The system of claim 1, wherein the gas exhaust network comprises at least one flow controller and a cavity ring-down spectrometer (CRDS). ### Claim 9 (depends on 1) The system of claim 1, wherein the vacuum network comprises at least one vacuum generating device capable of generating high vacuum and at least one vacuum gauge. ### Claim 10 (depends on 1) The apparatus as claimed in claim 1, wherein in use the crucible is rotated with respect to horizontal. ### Claim 11 (depends on 1) The apparatus as claimed in claim 1, wherein in use the crucible is rotated about 12 degrees with respect to horizontal. ### Claim 12 An apparatus adapted to purify target material, the apparatus comprising: a furnace having a central region defined therein and at least one heater configured to heat the central region in a substantially uniform manner; a vessel having an open end for loading, such that when inserted in the central region of the furnace, the open end of the vessel is located outside of the furnace; a crucible disposed within the metal vessel, the crucible having an open end and a closed end, the crucible disposed within the metal vessel such that the open end of the crucible faces the open end of the metal vessel, a sidewall of the crucible having a tapered shape that facilitates removal of an ingot of the target material from the crucible; a closure device covering the open end of the metal vessel, the closure device configured to form a seal having vacuum and pressure capability; an input tube having a first end located outside the vessel and a second end located inside the vessel, the second end of the input tube being positioned to direct an input gas flowing into the vessel through the input tube toward the crucible; and an exhaust tube having a first end located outside the metal vessel and a second end in flow communication with the inside of the metal vessel. ### Claim 13 (depends on 12) The apparatus of claim 12, wherein the crucible is a quartz crucible purified and cleaned to a level compatible with compound semiconductor crystal growth. ### Claim 14 (depends on 12) The apparatus of claim 12, wherein the crucible is comprised of carbon coated quartz, glassy carbon, graphite, glassy carbon coated graphite, or SiC-coated graphite. ### Claim 15 (depends on 12) The apparatus of claim 12, wherein the input tube is a metal tube or a glass tube. ### Claim 16 (depends on 12) The apparatus of claim 12, wherein the input tube is a ceramic tube or a graphite tube. ### Claim 17 (depends on 12) The apparatus of claim 12, further comprising: a vacuum port defined in a wall of the metal vessel.