# US 10,455,178 B2 · Optical sensor device and method for operating a time-of-flight sensor

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- Number: US 10,455,178 B2
- Document ID: US10455178B2
- Status: Granted
- Kind: B2
- Application number: 15/472,340
- Filed: 2017-03-29
- Published: 2017-11-16
- Granted: 2019-10-22
- Earliest claimed: 2016-05-13
- Assignees: Infineon Technologies AG
- Applicants: Infineon Technologies AG
- Inventors: Henning Feick
- Web page: https://patentgrep.com/patent/US10455178B2

## CPC

- G01S 7/4914: of detector arrays, e.g. charge-transfer gates
- H04N 25/767: Horizontal readout lines, multiplexers or registers
- G01S 17/00: Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S 17/894: Three-dimensional [3D] imaging with simultaneous measurement of time-of-flight at a two-dimensional [2D] array of receiver pixels, e.g. time-of-flight cameras or flash lidar
- H04N 25/77: Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
- H04N 25/778: comprising amplifiers shared between a plurality of pixels, i.e. at least one part of the amplifier must be on the sensor array itself
- H10F 39/80373: {characterised by the gate of the transistor}
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

An optical sensor device, which may be a time-of-flight sensor, comprises a pixel array having a plurality of pixels. Moreover, the optical sensor device comprises a read-out node configured to provide photo-generated charge carriers from a first pixel and a second pixel for read-out and a first transfer gate configured to enable a read-out of the first pixel using the read-out node and a second transfer gate to disable a read-out of the second pixel during read-out of the first pixel.

## Claims

### Claim 1

An optical sensor device, comprising:
a pixel array having at least three pixels;
a first read-out node configured to provide first photo-generated charge carriers from the at least three pixels for read-out;
a second read-out node configured to provide second photo-generated charge carriers successively from one or more of the at least three pixels for read-out;
a first transfer gate configured to enable a read-out of a first pixel, of the at least three pixels, using the first read-out node;
a second transfer gate configured to disable a read-out of a second pixel, of the at least three pixels, via the first read-out node during the read-out of the first pixel;
a third transfer gate configured to disable a read-out of a third pixel, of the at least three pixels, via the first read-out node during the read-out of the first pixel; and
a controller configured to control the first transfer gate, the second transfer gate, and the third transfer gate to perform a successive read-out of the at least three pixels,
the optical sensor device being a time-of-flight sensor, and
each remaining pixel, of the at least three pixels, being disabled for read-out via the first read-out node when one of the at least three pixels is enabled for read-out via the first read-out node.

### Claim 2 (depends on 1)

The optical sensor device of claim 1, wherein the optical sensor device is further configured to:
conduct a phase sensitive demodulation of the first photo-generated charge carriers.

### Claim 3 (depends on 1)

The optical sensor device of claim 1, wherein the first transfer gate is further configured to:
provide the first photo-generated charge carriers from a storage region of the first pixel to the first read-out node based on the first pixel being in a read-out mode; and
disable a transfer of the first photo-generated charge carriers from the storage region of the first pixel to the first read-out node based on the first pixel being in a sensing mode,
the storage region of the first pixel being configured to store the first photo-generated charge carriers of the first pixel.

### Claim 4 (depends on 1)

The optical sensor device of claim 1, wherein the second transfer gate is further configured to:
provide the first photo-generated charge carriers from a storage region of the second pixel to the first read-out node based on the second pixel being in a read-out mode; and
disable a transfer of the first photo-generated charge carriers from the storage region of the second pixel to the first read-out node based on the second pixel being in a sensing mode,
the storage region of the second pixel being configured to store the first photo-generated charge carriers of the second pixel.

### Claim 5 (depends on 1)

The optical sensor device of claim 1, wherein the first read-out node is further configured to:
provide the first photo-generated charge carriers from a first storage region of the first pixel; and
provide the first photo-generated charge carriers from a second storage region of the first pixel,
the second storage region being configured to store the first photo-generated charge carriers derived from an electromagnetic signal having a first phase, and
the first storage region being configured to store the first photo-generated charge carriers derived from the electromagnetic signal having a second phase.

### Claim 6 (depends on 1)

The optical sensor device of claim 1, wherein the one of the at least three pixels further comprises:
a control electrode configured to:
provide an electrical field into a conversion region of the optical sensor device such that an electromagnetic signal having a particular phase is converted into the first photo-generated charge carriers, and
provide the first photo-generated charge carriers to a storage region.

### Claim 7 (depends on 6)

The optical sensor device of claim 6, wherein the control electrode is a first control electrode;
wherein the electrical field is a first electrical field;
wherein the particular phase is a first phase;
wherein the storage region is a first storage region; and
wherein the one of the at least three pixels further comprises:
a second control electrode configured to:
provide a second electrical field into a conversion region of the optical sensor device such that an electromagnetic signal having a second phase is converted into the second photo-generated charge carriers, and
provide the second photo-generated charge carriers to a second storage region.

### Claim 8 (depends on 1)

The optical sensor device of claim 1, wherein the controller is further configured to:
control a read-out of the one or more of the at least three pixels through the second read-out node.

### Claim 9 (depends on 1)

The optical sensor device of claim 1, wherein the controller is further configured to:
control the first transfer gate such that the first transfer gate obtains a first electric potential based on the first pixel being in a read-out mode, and
control the first transfer gate such that the first transfer gate obtains a second electric potential based on the first pixel being in a sensing mode,
the first electric potential being different from the second electric potential.

### Claim 10 (depends on 1)

The optical sensor device of claim 1, wherein the controller is further configured to:
control transfer gates of the at least three pixels such that a transfer of the first photo-generated charge carriers to the first read-out node is disabled for each remaining pixel, of the at least three pixels, based on the transfer of the first photo-generated charge carriers to the first read-out node being enabled for the one of the at least three pixels.

### Claim 11 (depends on 1)

The optical sensor device of claim 1, wherein each of the at least three pixels include transfer gates.

### Claim 12 (depends on 1)

The optical sensor device of claim 1, further comprising:
a control electrode arranged at least partly covering a storage gate.

### Claim 13 (depends on 1)

The optical sensor device of claim 1, wherein each remaining pixel, of the at least three pixels, are in a sensing mode when the one of the at least three pixels is enabled for read-out.

### Claim 14 (depends on 1)

The optical sensor device of claim 1, wherein the first transfer gate is further configured to:
provide the second photo-generated charge carriers from a storage region of the first pixel to the second read-out node based on the first pixel being in a read-out mode; and
disable a transfer of the second photo-generated charge carriers from the storage region of the first pixel to the second read-out node based on the first pixel being in a sensing mode,
the storage region of the first pixel being configured to store the second photo-generated charge carriers of the first pixel.

### Claim 15

A method for operating a time-of-flight sensor, comprising:
providing, by a device via a first read-out node, first photo-generated charge carriers from a plurality of pixels for read-out,
the plurality of pixels including at least three pixels;
providing, by the device via a second read-out node, second photo-generated charge carriers successively from one or more of the plurality of pixels for read-out;
enabling, by a first transfer gate of the device, a read-out of a first pixel, of the plurality of pixels, using the first read-out node;
disabling, by a second transfer gate of the device, a read-out of a second pixel, of the plurality of pixels, via the first read-out node during the read-out of the first pixel;
disabling, by a third transfer gate of the device, a read-out of a third pixel, of the plurality of pixels, via the first read-out node during the read-out of the first pixel; and
controlling, by the device, the first transfer gate, the second transfer gate, and the third transfer gate to perform a successive read-out of the plurality of pixels,
each remaining pixel, of the plurality of pixels, being disabled for read-out via the first read-out node when one of the plurality of pixels is enabled for read-out via the first read-out node.

### Claim 16 (depends on 15)

The method of claim 15, further comprising:
conducting a phase sensitive demodulation of the first photo-generated charge carriers.

### Claim 17 (depends on 15)

The method of claim 15, further comprising:
providing the first photo-generated charge carriers from a storage region of the first pixel to the first read-out node based on the first pixel being in a read-out mode; and
disabling a transfer of the first photo-generated charge carriers from the storage region of the first pixel to the first read-out node based on the first pixel being in a sensing mode,
the storage region of the first pixel being configured to store the first photo-generated charge carriers of the first pixel.

### Claim 18 (depends on 15)

The method of claim 15, further comprising:
providing the second photo-generated charge carriers from a storage region of the second pixel to the second read-out node based on the second pixel being in a read-out mode; and
disabling a transfer of the second photo-generated charge carriers from the storage region of the second pixel to the second read-out node based on the second pixel being in a sensing mode,
the storage region of the second pixel being configured to store the second photo-generated charge carriers of the second pixel.

### Claim 19 (depends on 15)

The method of claim 15, further comprising:
providing an electrical field into a conversion region of the device such that an electromagnetic signal having a particular phase is converted into the first photo-generated charge carriers, and
providing the first photo-generated charge carriers to a storage region.

### Claim 20

An optical sensor device, comprising:
a pixel array having at least three pixels;
a first read-out node configured to provide first photo-generated charge carriers from the at least three pixels for read-out;
a second read-out node configured to provide second photo-generated charge carriers from the at least three pixels for read-out,
the second photo-generated charge carriers being different from first the photo-generated charge carriers,
each pixel, of the at least three pixels, comprising a first transfer gate configured to provide the first photo-generated charge carriers from a first storage region of each of the at least three pixels to the first read-out node,
each pixel, of the at least three pixels, comprising a second transfer gate configured to provide the second photo-generated charge carriers from a second storage region of each of the at least three pixels to the second read-out node,
the first storage region being configured to store the first photo-generated charge carriers derived from an electromagnetic signal having a first phase, and
the second storage region being configured to store the second photo-generated charge carriers derived from the electromagnetic signal having a second phase; and
a controller configured to control transfer gates of the at least three pixels connected to the first read-out node such that when one of the at least three pixels connected to the first read-out node is enabled for read-out, remaining pixels, of the at least three pixels, connected to the first read-out node are disabled for read-out to perform a successive read-out of the at least three pixels connected to the first read-out node.
