# US 10,455,137 B2 · Auto-focus system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,455,137 B2 - Document ID: US10455137B2 - Status: Granted - Kind: B2 - Application number: 14/444,607 - Filed: 2014-07-28 - Published: 2016-01-28 - Granted: 2019-10-22 - Earliest claimed: 2014-07-28 - Assignees: Orbotech Ltd. - Applicants: Orbotech Ltd. - Inventors: Ofer Saphier; Doron Malka; David Fisch - Web page: https://patentgrep.com/patent/US10455137B2 ## CPC - H04N 23/673: {based on contrast or high frequency components of image signals, e.g. hill climbing method} - G01S 7/481: Constructional features, e.g. arrangements of optical elements - G01S 7/484: Transmitters - G01S 7/486: Receivers - G01S 17/08: for measuring distance only (indirect measurement G01S17/46; active triangulation systems G01S17/48) - G01S 17/48: Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves - G02B 7/102: {controlled by a microcomputer (cameras with interchangeable lenses G03B17/14)} - G02B 7/32: using active means, e.g. light emitter {(including both an active and a passive focus detecting device G02B7/285; using ultrasound G02B7/40)} - G01S 7/4815: {using multiple transmitters} - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION - G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract A distance measuring system is provided for auto focusing a camera of an inspection system for inspecting a planar surface that is patterned. The system includes a pattern generator, an image sensor, an optical element(s) and a processor. The pattern generator projects a spatially random pattern toward the planar surface at an oblique angle. The optical element(s) forms the image of the reflected pattern on the image sensor and the image sensor captures an image of the spatially random pattern reflected off the planar surface. The processor processes the image of the spatially random pattern and provides auto-focus information. ## Claims ### Claim 1 A distance measuring system for auto focusing a camera of an inspection system for inspecting a planar surface that includes a patterned object, the distance measuring system comprising: a pattern generator that generates a spatially random pattern and projects the spatially random pattern toward the planar surface at an oblique angle; an image sensor that captures an image of the spatially random pattern reflected off the planar surface; at least one optical element that forms the image of the reflected pattern on the image sensor; and a processor that obtains distance information between the image sensor and the planar surface based on at least one of shifting and scaling of at least one feature of the spatially random pattern, and that provides auto-focus information based on the distance information, wherein the pattern generator is configured to project the spatially random pattern such that the shifting or scaling of the projected spatially random pattern captured in the image changes non-linearly in response to different distances between the image sensor and the planar surface, wherein the processor detects the nonlinear changes of the shifting or scaling of the spatially random pattern in the image and determines changes in distance between the image sensor and the planar surface using the nonlinear changes to determine the auto-focus information, and wherein the spatially random pattern is uncorrelated with the pattern of the patterned object. ### Claim 2 (depends on 1) The system according to claim 1, wherein the pattern generator includes a laser diode that illuminates in a light range that is other than a range used for inspecting the planar surface. ### Claim 3 (depends on 1) The system according to claim 1, wherein the pattern generator includes an illuminator that provides a coherent light beam and a diffuser for generating the spatially random pattern. ### Claim 4 (depends on 3) The system according to claim 3, wherein the pattern generator includes at least one lens through which the spatially random pattern is projected and wherein distance between the illuminator with the diffuser and the at least one lens is defined to yield divergence of the rays that are projected onto the planar surface. ### Claim 5 (depends on 1) The system according to claim 1, wherein the pattern generator includes more than one coherent illumination source, each source generating a unique spatially random pattern. ### Claim 6 (depends on 5) The system according to claim 5, wherein each coherent illumination source illuminates through a dedicated diffuser. ### Claim 7 (depends on 5) The system according to claim 5, wherein each illuminator projects at a different angle. ### Claim 8 (depends on 1) The system according to claim 1, wherein the pattern generator is configured to generate a speckle pattern. ### Claim 9 (depends on 1) The system according to claim 1, wherein the pattern generator projects the spatially random pattern over an area larger than a field of view of the image sensor. ### Claim 10 (depends on 1) The system according to claim 1, wherein the at least one optical element is the imaging optics used for capturing images of the planar surface for inspection. ### Claim 11 (depends on 1) The system according to claim 1, wherein the at least one optical element includes microscope optics and wherein the pattern generator projects the spatially random pattern toward the planar surface through an objective lens of the microscope optics. ### Claim 12 (depends on 1) The system according to claim 1, wherein the image sensor captures the image of the spatially random pattern in a region of interest mode. ### Claim 13 (depends on 12) The system according to claim 12, wherein the image sensor switches from capturing the image of the spatially random pattern in a region of interest mode to capturing a second image for inspection of the planar surface in a full frame mode, wherein the image captured in the region of interest mode is smaller than the image captured in the full frame mode. ### Claim 14 (depends on 1) The system according to claim 1, wherein the pattern generator includes a laser beam source and a holographic mask. ### Claim 15 (depends on 1) The system according to claim 1, wherein the non-linear changes of the projected spatially random pattern includes non-uniform scaling or non-uniform translation of the spatially random pattern in the image in response to different distances between the image sensor and the planar surface. ### Claim 16 A distance measuring system for auto focusing a camera of an inspection system for inspecting a planar surface that includes a patterned object, the distance measuring system comprising: a pattern generator that generates a spatially random pattern and projects the spatially random pattern toward the planar surface at an oblique angle; an image sensor that captures an image of the spatially random pattern reflected off the planar surface; at least one optical element that forms the image of the reflected pattern on the image sensor; a processor that processes the image of the spatially random pattern captured by the image sensor and provides auto-focus information based on at least one of shifting and scaling of at least one feature of the spatially-random pattern; and a memory for storing at least one calibration image of the spatially random pattern reflected off the planar surface, wherein the processor performs correlation between the image of the spatially random pattern and the calibration image of the spatially random pattern, wherein the pattern generator is configured to project the spatially random pattern such that the shifting or scaling of the projected spatially random pattern captured in the image changes non-linearly in response to different distances between the image sensor and the planar surface, wherein the processor detects the nonlinear changes of the shifting or scaling of the spatially random pattern in the image and determines changes in distance between the image sensor and the planar surface using the nonlinear changes to determine the auto-focus information, and wherein the spatially random pattern is uncorrelated with the pattern of the patterned object. ### Claim 17 (depends on 16) The system according to claim 16, wherein the non-linear changes of the projected spatially random pattern includes non-uniform scaling or non-uniform of the spatially random pattern in the image in response to different distances between the image sensor and the planar surface. ### Claim 18 An auto-focus system for auto focusing a camera of an inspection system with respect to a planar surface having a patterned object for inspection comprises: a pattern generator that generates a spatially random pattern and projects the pattern generated toward a planar surface at an oblique angle; a camera that captures an image of the spatially random pattern reflected off the planar surface; a processor that obtains distance information between the image sensor and the planar surface based on at least one of shifting and scaling of at least one feature of the spatially random pattern, and that provides auto-focus information based on the distance information; an actuator for changing a working distance between the camera and the planar surface; and a controller that controls operation of the actuator in response to the auto-focus information provided by the processor, wherein the pattern generator is configured to project the spatially random pattern such that the shifting or scaling of the projected spatially random pattern captured in the image changes non-linearly in response to different distances between the image sensor and the planar surface, wherein the processor detects the nonlinear changes of the shifting or scaling of the spatially random pattern in the image and determines changes in distance between the image sensor and the planar surface using the nonlinear changes to determine the auto-focus information, and wherein the spatially random pattern is uncorrelated with the pattern of the patterned object. ### Claim 19 (depends on 18) The system according to claim 18, wherein the pattern generator includes a laser diode that illuminates in a light range that is other than a range used for inspecting the planar surface. ### Claim 20 (depends on 18) The system according to claim 18, wherein the pattern generator includes an illuminator that provides a coherent light beam and a diffuser for generating the spatially random pattern. ### Claim 21 (depends on 18) The system according to claim 18, wherein the processor provides a distance and a direction toward a desired actuator position. ### Claim 22 (depends on 18) The system according to claim 18, wherein the camera captures the image of the spatially random pattern in a region of interest mode. ### Claim 23 (depends on 18) The system according to claim 18, wherein the non-linear changes of the projected spatially random pattern includes non-uniform scaling or non-uniform of the spatially random pattern in the image in response to different distances between the image sensor and the planar surface. ### Claim 24 An auto-focus system for auto focusing a camera of an inspection system with respect to a planar surface having a patterned object for inspection comprises: a pattern generator that generates a spatially random pattern and projects the pattern generated toward a planar surface at an oblique angle; a camera that captures an image of the spatially random pattern reflected off the planar surface; a processor that processes the image of the spatially random pattern captured by the camera and provides auto-focus information based on at least one of shifting and scaling of at least one feature of the spatially-random pattern; and a memory for storing at least one calibration image of the spatially random pattern reflected off the planar surface at a known actuator position, wherein the processor performs correlation between the image of the spatially random pattern and the calibration image of the spatially random pattern, wherein the pattern generator is configured to project the spatially random pattern such that the shifting or scaling of the projected spatially random pattern captured in the image changes non-linearly in response to different distances between the image sensor and the planar surface, wherein the processor detects the nonlinear changes of the shifting or scaling of the spatially random pattern in the image and determines changes in distance between the image sensor and the planar surface using the nonlinear changes to determine the auto-focus information, and wherein the spatially random pattern is uncorrelated with the pattern of the patterned object. ### Claim 25 (depends on 24) The system according to claim 24, wherein the non-linear changes of the projected spatially random pattern includes non-uniform scaling or non-uniform of the spatially random pattern in the image in response to different distances between the image sensor and the planar surface.