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US 10,453,487 B2Granted
Magnetic stack including MgO—Ti(ON) interlayer
AssigneeSeagate Technology LLC
InventorsYukiko Kubota, Timothy John Klemmer, Kai Chieh Chang, Li Gao, Yinfeng Ding, Yingguo Peng, Jan-Ulrich Thiele
Life of this patent
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Abstract
A stack includes a substrate and a magnetic recording layer. Disposed between the substrate and magnetic recording layer is an MgO—Ti(ON) layer.
Claims15
A stack, comprising:
- a substrate;
- a magnetic recording layer;
- and
- a non-magnetic, continuous MgO—Ti(ON) layer disposed between the substrate and the magnetic recording layer, wherein the MgO—Ti(ON) layer is a (MgO)x (Ti0.5 (OyN(1-y))0.5)1-x layer.
1 more element
A stack, comprising:
- a substrate;
- a magnetic recording layer;
- a heatsink layer disposed between the substrate and the magnetic recording layer;
- and
- a non-magnetic, continuous MgO—Ti(ON) layer disposed between the heatsink layer and the magnetic recording layer, wherein the MgO—Ti(ON) layer is a (MgO)x (Ti0.5 (OyN(1-y))0.5)1-x layer.
2 more elements
A method, comprising:
- depositing MgO and TiO using a composite sputtering target, wherein the composite sputtering target comprises at most 70 vol. % MgO, in a nitrogen environment to form a non-magnetic, continuous MgO—Ti(ON) layer, wherein the MgO—Ti(ON) layer is a (MgO)x (Ti0.5(OyN(1-y))0.5)1-x layer;
- and
- epitaxially growing an FePt magnetic layer on the MgO—Ti(ON) layer.
Dependencies are inferred from the claim text.