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US 10,451,508 B2Granted
Pressure transducer and method for fabricating the same
AssigneeSchlumberger Technology Corporation
InventorsShigeo Daito, Takenori Motoki, Noriyuki Matsumoto, Martine Hori
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Abstract
A pressure transducer comprises a housing including a body section and at least one end cap at one end of the body section, which are made of piezoelectric crystal, and a piezoelectric resonator in the housing. The body section and the end cap are bonded by an atomic diffusion bonding method.
Claims18
A pressure transducer comprising:
- a housing including a body section and at least one end cap at one end of the body section, the housing being made of piezoelectric crystal;
- and
- a piezoelectric resonator in the housing,
- wherein the body section and the end cap are bonded by an atomic diffusion bonding method via an electrically conductive layer.
1 more element
A tool for pressure measurement comprising:
- a pressure transducer and at least one oscillator circuit coupled to the pressure transducer, wherein
- the pressure transducer comprising:
- a housing including a body section and at least one end cap at one end of the body section, the housing being made of piezoelectric crystal;
- and
- a piezoelectric resonator in the housing,
- wherein the body section and the end cap are bonded by an atomic diffusion bonding method via an electrically conductive layer.
3 more elements
A method for fabricating a pressure transducer, comprising:
- forming separately a body section and at least one end cap of a housing;
- forming a piezoelectric resonator in the housing;
- depositing electrically conductive material on the body section;
- and
- bonding the body section and the end cap by an atomic diffusion bonding method via an electrically conductive layer.
2 more elements
Dependencies are inferred from the claim text.