SiC single crystal and method for producing same
AssigneesToyota Jidosha Kabushiki Kaisha, Nippon Steel & Sumitomo Metal Corporation
InventorsHironori Daikoku, Motohisa Kado, Kazuhito Kamei, Kazuhiko Kusunoki
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Abstract
Provided is a SiC single crystal that has a large growth thickness and contains no inclusions. A SiC single crystal grown by a solution process, wherein the total length M of the outer peripheral section formed by the {1-100} faces on the {0001} growth surface of the SiC single crystal, and the length P of the outer periphery of the growth surface of the SiC single crystal, satisfy the relationship M/P≤0.70, and the length in the growth direction of the SiC single crystal is 2 mm or greater.
Claims9
A method for producing a SiC single crystal in which a SiC seed crystal substrate having a {0001} face,
- the SiC seed crystal substrate being held on a center portion of a seed crystal holding shaft, the seed crystal holding shaft including the center portion and a side portion that surrounds the center portion, the side portion having alternating recesses and raised sections, is contacted with a Si—C solution in a crucible,
- the Si—C solution having a temperature gradient such that a temperature of the Si—C solution decreases from an interior of the Si—C solution toward a surface of the Si—C solution, to grow the SiC single crystal from the {0001} face of the SiC seed crystal substrate in a <11-20> direction and <1-100> direction and form a grown SiC single crystal, wherein the method comprises:
- growing the SiC single crystal from the {0001} face of the SiC seed crystal substrate to a length of 2 mm or greater in the growth direction to form the grown SiC single crystal, and
- prior to growing the SiC single crystal, configuring the seed crystal substrate and the seed crystal holding shaft to reduce heat loss from the <11-20> direction to be lower than heat loss from the <1-100> direction by bonding a top face of the seed crystal substrate to the center portion of the seed crystal holding shaft so that
- the <1-100> direction of the seed crystal substrate is oriented to coincide with the recesses of the seed crystal holding shaft, and
- the <11-20> direction of the seed crystal substrate is oriented to coincide with the raised sections of the seed crystal holding shaft;
- wherein
- a ratio S/C of a diameter S of the SiC seed crystal substrate to an inner diameter C of the crucible satisfies a relationship 0.50≤S/C<1.0.
Dependencies are inferred from the claim text.