Bias correction for lithography
AssigneeD2S, Inc.
InventorHarold Robert Zable
Life of this patent
Estimating the term…
Abstract
Methods include inputting an array of pixels, where each pixel in the array of pixels has a pixel dose. The array of pixels represents dosage on a surface to be exposed with a plurality of patterns, each pattern of the plurality of patterns having an edge. A target bias is input. An edge of a pattern in the plurality of patterns is identified. For each pixel which is in a neighborhood of the identified edge, a calculated pixel dose is calculated such that the identified edge is relocated by the target bias. The array of pixels with the calculated pixel doses is output. Systems for performing the methods are also disclosed.
Claims12
A method comprising:
- inputting an array of pixels, wherein each pixel in the array of pixels comprises a pixel dose, and wherein the array of pixels represents dosage on a surface to be exposed with a plurality of patterns, each pattern in the plurality of patterns comprising an edge;
- inputting a target bias;
- identifying the edge of a pattern in the plurality of patterns, wherein the edge location may be identified within a fractional portion of each pixel;
- for each pixel which is in a neighborhood of the identified edge, calculating a calculated pixel dose such that the identified edge is relocated by the target bias, wherein calculating the calculated pixel dose comprises a simulated effect of a dose change;
- and
- outputting the array of pixels with the calculated pixel doses.
A method comprising:
- inputting a plurality of patterns to be exposed on a surface, wherein each pattern comprises an edge;
- inputting a target bias;
- rasterizing the plurality of patterns to create an array of pixels, wherein each pixel in the array of pixels represents an exposure dosage, and wherein a location of the edge may be within a fractional portion of each pixel;
- calculating dosages of pixels in the array of pixels, wherein the calculated dosages relocate the edge of a pattern in the plurality of patterns, wherein the relocation is based on the target bias, and wherein calculating the calculated pixel dose comprises a simulated effect of a dose change;
- and
- outputting the array of pixels, including the calculated pixel dosages.
Dependencies are inferred from the claim text.