# US 10,442,092 B2 · Force detection device and robot

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- Number: US 10,442,092 B2
- Document ID: US10442092B2
- Status: Granted
- Kind: B2
- Application number: 15/016,462
- Filed: 2016-02-05
- Published: 2016-08-11
- Granted: 2019-10-15
- Earliest claimed: 2015-02-09
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Yoshiteru Nishimura; Nobuyuki Mizushima; Toshiyuki Kamiya; Hiroki Kawai
- Web page: https://patentgrep.com/patent/US10442092B2

## CPC

- B25J 19/028: {Piezoresistive or piezoelectric sensing devices}
- B25J 13/085: {Force or torque sensors (B25J13/082, B25J13/084 take precedence)}
- G01L 1/16: using properties of piezoelectric devices
- Y10S 901/46: Sensing device
- B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50})
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

To obtain a force detection device and a robot light in weight and having excellent detection accuracy, a force detection device includes a first member, a second member joined to the first member, and a piezoelectric element joined to the second member. A material forming the first member is different from a material forming the second member. The first member is formed in a plate shape. The piezoelectric element and the second member are disposed at an end portion of the first member. A through-hole is formed in the center portion of the first member.

## Claims

### Claim 1

A force detection device comprising:
a base plate including a plate-shaped first member, and a second member attached to the first member;
a cover plate including a third and a fourth member; and
a sensor device positioned between the base plate and cover plate, and having a piezoelectric element contained in a package;
wherein the first member and the third member do not directly contact the sensor device,
a material forming the first member is different from a material forming the second member,
the second member protrudes in a direction toward the cover plate,
a coefficient of linear expansion of the material forming the second member is smaller than a coefficient of linear expansion of the material forming the first member,
a density of the material forming the first member is smaller than a density of the material forming the second member,
a coefficient of linear expansion of a material which forms the fourth member is smaller than a coefficient of linear expansion of a material which forms the third member, and
a density of the material which forms the third member is smaller than a density of the material which forms the fourth member.

### Claim 2 (depends on 1)

The force detection device according to claim 1, wherein
the piezoelectric element and the second member are disposed at an end portion of the first member, and
a through-hole is formed in a center portion of the first member.

### Claim 3 (depends on 1)

The force detection device according to claim 1,
wherein the fourth member is joined to the third member and configured to sandwich the piezoelectric element in conjunction with the second member, wherein
a material forming the third member is different from a material forming the fourth member.

### Claim 4 (depends on 3)

The force detection device according to claim 3,
wherein the piezoelectric element and the fourth member are disposed at an end portion of the third member, and
a through-hole is formed in a center portion of the third member.

### Claim 5 (depends on 3)

The force detection device according to claim 3, wherein the material forming the second member and the material forming the fourth member are the same.

### Claim 6 (depends on 3)

The force detection device according to claim 3, wherein the material forming the first member and the material forming the third member are the same.

### Claim 7 (depends on 3)

The force detection device according to claim 3, wherein yield strength of the material forming the fourth member is larger than yield strength of the material forming the third member.

### Claim 8 (depends on 1)

The force detection device according to claim 1, wherein yield strength of the material forming the second member is larger than yield strength of the material forming the first member.

### Claim 9 (depends on 1)

A robot comprising:
an arm;
an end effector provided in the arm; and
the force detection device according to claim 1.