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US 10,433,370 B2Granted
Micro multi-array heater and micro multi-array sensor
AssigneePoint Engineering Co., Ltd.
InventorsBum Mo Ahn, Seung Ho Park, Sung Hyun Byun
Life of this patent
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Abstract
A micro multi-array heater and a micro multi-array sensor provided with the micro multi-array heater are provided. The micro multi-array heater includes a substrate and a heater electrode formed on the substrate. The heater electrode includes a first heater electrode having a first heat generation pattern and a second heater electrode having a second heat generation pattern. The first heat generation pattern and the second heat generation pattern are formed to have different heat generation amounts.
Claims17
A multi-array sensor with a multi-array heater comprising:
- a substrate, which is an anodic oxide film including a porous layer, obtained by anodizing a metallic base material and then removing the base material;
- and
- heater electrodes formed on the substrate, wherein the heater electrodes include a first heater electrode having a first heat generation pattern and a second heater electrode having a second heat generation pattern, and
- the first heat generation pattern and the second heat generation pattern are formed to have different heat generation amounts and different thicknesses.
1 more element
Dependencies are inferred from the claim text.