DSR speaker elements and methods of manufacturing thereof
AssigneeAudio Pixels Ltd.
InventorsShay Kaplan, Yuval Cohen, Daniel Lewin, Meir Ben Simon, Eric Andreas Haber
Life of this patent
Estimating the term…
Abstract
There is provided a DSR speaker comprising at least a central moving element, a plurality of peripheral flexure benders, each flexure bender comprising at least a pair of electrodes and at least a piezoelectric material layer, the flexure benders being connected to said moving element and being configured to move said moving element along an axis perpendicular to a moving element surface, in response to an electrical stimulus applied to said electrodes, in order to produce sound, and at least a mechanical stopper which is configured to limit the motion of said moving element. Various manufacturing methods are also described.
Claims16
A piezo-electric actuator comprising:
- a substrate,
- at least a central moving element;
- a plurality of peripheral flexure benders, each flexure bender comprising at least one electrode and at least a piezoelectric material layer,
- wherein at least one flexure bender comprises a top electrode split into at least two different sub-electrodes and a bottom electrode split into at least two different sub-electrodes,
- wherein when a sub-electrode of the top electrode is connected to a positive potential, and another sub-electrode of the top electrode is connected to a negative potential, corresponding sub-electrodes of the bottom electrode are connected to opposite potentials with respect to the sub-electrodes of the top electrode, and
- wherein the flexure benders are connected to said moving element and being configured to move said moving element along an axis perpendicular to a moving element surface, in response to an electrical stimulus applied to said at least one electrode.
A method of forming a piezo-electric actuator, the method comprising:
- providing a substrate base;
- disposing a sacrificial layer on at least part of said substrate base;
- disposing a first electrode layer on at least part of said sacrificial layer;
- disposing a first piezoelectric material layer on at least part of said first electrode layer,
- forming gaps to define:
- at least one peripheral flexure bender comprising a portion of said first electrode layer and at least one electrode comprising a portion of said first piezoelectric material layer, and
- a central moving element comprising another portion of said first piezoelectric material layer,
- wherein said flexure bender is connected to said moving element, for moving said moving element in response to an electrical stimulus applied to said electrodes, and
- wherein the method comprises a step of disposing removable fins, said removable fins comprising a material that can later be selectively removed for forming said gaps.
Dependencies are inferred from the claim text.