MEMS circuit board module having an integrated piezoelectric structure, and electroacoustic transducer arrangement
AssigneeUSound GmbH
InventorsAndrea Rusconi Clerici Beltrami, Ferruccio Bottoni
Life of this patent
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AssigneeUSound GmbH
InventorsAndrea Rusconi Clerici Beltrami, Ferruccio Bottoni
Estimating the term…
The invention relates to a MEMS printed circuit board module (1) for a sound transducer assembly (2) for generating and/or detecting surge waves in the audible wavelength spectrum with a printed circuit board (4) and a multi-layer piezoelectric structure (5), by means of which a membrane (6) provided for this purpose can be set into oscillation and/or oscillations of a membrane (6) can be detected. In accordance with the invention, the multi-layer piezoelectric structure (5) is directly connected to the printed circuit board (4). In addition, the invention relates to a sound transducer assembly (2) with such a MEMS printed circuit board module (1) along with a method for the manufacturing of the MEMS printed circuit board module (1) and the sound transducer assembly (2).
MEMS printed circuit board module for a sound transducer assembly for generating in a membrane and/or detecting from the membrane, sound waves in the audible wavelength spectrum, the MEMS printed circuit board module comprising:
Sound transducer assembly for generating and/or detecting sound waves in the audible wavelength spectrum, comprising:
Dependencies are inferred from the claim text.