X-ray small angle optical system
AssigneeRigaku Corporation
InventorsKazuki Ito, Kazuhiko Omote, Licai Jiang
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Abstract
Provided is an X-ray small angle optical system, which easily achieves a desired angular resolution, including: an X-ray source having a microfocus; a multilayer mirror having an elliptical reflection surface, and being configured to collect X-rays emitted from the X-ray source and to irradiate a sample; and an X-ray detector configured to detect scattered X-rays generated from the sample, in which the elliptical reflection surface of the multilayer mirror has a focal point A and a focal point B, in which the X-ray source is arranged such that the microfocus includes the focal point A, and in which the X-ray detector is arranged on the multilayer mirror side of the focal point B.
Claims10
An X-ray small angle optical system for use with a sample, comprising:
- an X-ray source having a microfocus;
- a multilayer mirror having an elliptical reflection surface, and being configured to collect X-rays emitted from the X-ray source and to irradiate the sample;
- a sample stage configured to support the sample;
- and
- an X-ray detector configured to detect scattered X-rays generated from the sample,
- wherein the elliptical reflection surface of the multilayer mirror has a focal point A and a focal point B which are determined by a shape of the elliptical reflection surface,
- wherein the X-ray source is arranged such that the microfocus includes the focal point A, and
- wherein the X-ray detector is interposed between the sample stage and the focal point B.
Dependencies are inferred from the claim text.