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US 10,421,845 B2Granted
Method of manufacturing polishing pad
AssigneeKpx Chemical Co., Ltd.
InventorsSeung-Geun Kim, Hak-Su Kang, Jeong-Seon Choo, Dae-Han Jung, Gi-Young Park
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Abstract
A method of manufacturing a polishing pad includes producing an urethane prepolymer having a viscosity of 20,000 cps (at 25° C.) to 40,000 cps (at 25° C.) by mixing a plurality of polymers, mixing the urethane prepolymer with an inert gas and a low-boiling blowing agent having a boiling point of 60° C. to 150° C., and manufacturing a polishing layer including porous pores by causing a mixture produced at the mixing to be subjected to gelation and curing in a predetermined cast.
Claims6
A method of manufacturing a polishing pad, the method comprising:
- (a) producing an urethane prepolymer having a viscosity of 20,000 cps (at 25° C.) to 40,000 cps (at 25° C.) by mixing a plurality of polymer molecules, wherein the plurality of polymer molecules comprises a polymer having four or more hydroxyl groups, and an amount of the polymer having four or more hydroxyl groups ranges from 1% to 30% based on a total weight of the urethane prepolymer;
- (b) mixing the urethane prepolymer produced at the producing step (a) with an inert gas and a low-boiling blowing agent having a boiling point of 60° C. to 150° C.;
- and
- (c) manufacturing a polishing layer including porous pores by causing a mixture produced at the mixing step (b) to be subjected to gelation and curing in a predetermined cast,
- wherein, the mixing step (b) includes causing an average size of pores produced by mixing the inert gas of 5% to 30% and the low-boiling blowing agent of 0.1% to 10% of a total volume of a mixture produced at the mixing step (b) with the urethane prepolymer produced at the producing step (a) to be 31 μm or smaller.
2 more elements
Dependencies are inferred from the claim text.