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US 10,416,380 B1Granted
Suspended photonic waveguides with top side sealing
AssigneeAcacia Communications, Inc.
InventorsLi Chen, Long Chen, Christopher Doerr
Life of this patent
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Abstract
Techniques for forming a photonic device that includes a suspended photonic structure suspended over a silicon substrate are described. A sealed cavity is positioned between the silicon substrate and the photonic structure, and one or more regions of dielectric material act to seal the cavity. Additional structure(s) may be formed on top of the dielectric material.
Claims20
An apparatus comprising:
- a photonic structure suspended over a silicon substrate;
- a sealed cavity positioned between the silicon substrate and the photonic structure, wherein the sealed cavity is bounded at least in part by the silicon substrate;
- and
- at least one region of dielectric material formed to seal the cavity, wherein the at least one region of dielectric material overlaps with the sealed cavity within a layer that includes the photonic structure.
1 more element
A method for forming a photonic device comprising:
- forming a photonic structure over a silicon substrate;
- forming at least one trench that extends to the silicon substrate;
- removing a portion of the silicon substrate underneath the photonic structure;
- and
- filling, at least partially, the at least one trench with dielectric material to form a sealed cavity between the photonic structure and the silicon substrate, wherein the sealed cavity is bounded at least in part by the silicon substrate.
2 more elements
Dependencies are inferred from the claim text.