US 10,410,901 B2Granted

Electrostatic chuck table using method

AssigneeDisco Corporation

InventorsKenji Furuta, Yuriko Sato, Sakae Matsuzaki

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Abstract

An electrostatic chuck table includes a plate-shaped base portion capable of transmitting a laser beam to be applied to a workpiece and an electrostatic attraction electrode portion capable of transmitting the laser beam. The laser beam has a transmission wavelength to the workpiece. The base portion has a first surface and a second surface opposite to the first surface. The electrode portion is formed on the first surface of the base portion. A method for using the electrostatic chuck table includes a workpiece holding step of applying a voltage to the electrode portion formed on the first surface to thereby electrostatically hold the workpiece on the second surface, and a modified layer forming step of applying the laser beam through the first surface to a predetermined position inside the workpiece held on the second surface to thereby form a modified layer inside the workpiece.

Claims5

Dependent claims

An electrostatic chuck table using method for using an electrostatic chuck table including:

a plate-shaped base portion capable of transmitting a laser beam therethough to a workpiece, said laser beam having a transmission wavelength with respect to said workpiece, said base portion having a first surface and a second surface opposite to said first surface, and
an electrostatic attraction electrode portion capable of transmitting said laser beam therethrough, said electrode portion being formed on said first surface of said base portion,
said electrostatic chuck table using method comprising:
a workpiece holding step of applying a voltage to said electrode portion formed on said first surface to thereby electrostatically hold said workpiece on said second surface;
and
a modified layer forming step of applying said laser beam through said first surface to a predetermined position inside said workpiece held on said second surface to thereby form a modified layer inside said workpiece while said workpiece is electrostatically held on said second surface.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/905,126Filed 26 Feb 2018
Priority: JP 2017-03531627 Feb 2017
Published: US 2018/0247853 A130 Aug 2018
Granted: 10 Sep 2019
Term ends: Not estimatedThe source records don’t support an estimate.

Classification9 codes

H10P 72/722
Using electrostatic chucks: details of electrostatic chucks
B23K 26/009
Working by laser beam, e.g. welding, cutting or boring: using a non-absorbing, e.g. transparent, reflective or refractive, layer on the workpiece
B23K 26/037
Aligning the laser beam: by pressing on the workpiece, e.g. using a pressing roller foot
B23K 26/53
Working by transmitting the laser beam through or within the workpiece: for modifying or reforming the material inside the workpiece, e.g. for…