Micro elements transfer device and method
AssigneeXiamen Sanan Optoelectronics Technology Co., Ltd.
InventorsChen-ke Hsu, Jiali Zhuo, Xiaojuan Shao, Jiansen Zheng
Life of this patent
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Abstract
A transfer device for micro element with a test circuit can test the micro element during transfer. The transfer device for micro elements includes: a base substrate, having two surfaces opposite to each other; a pick-up head array, formed over the first surface of the base substrate for picking up or releasing the micro element; a test circuit set inside or/on the surface of the base substrate, which has a series of sub-test circuits, each sub-test circuit at least having two test electrodes for simultaneous test of photoelectric parameters of the micro element when the transfer device transfers the micro element.
Claims20
A transfer device for a micro element, the transfer device comprising:
- a base substrate, having two opposing surfaces;
- a pick-up head array, formed over a first surface among the two opposing surfaces of the base substrate for picking up or releasing the micro element;
- and
- a test circuit set inside the base substrate and/or on one of the two opposing surfaces of the base substrate, which has a series of sub-test circuits, each sub-test circuit at least having two test electrodes for simultaneous test of photoelectric parameters of the micro element when the transfer device transfers the micro element.
A transfer method of a micro element, the method comprising:
- (1) providing a transfer device, which comprises a base substrate, a pick-up head array formed over a surface of the base substrate and a test circuit inside and/or on the surface of the base substrate, wherein, the test circuit has a series of sub-test circuits, each sub-test circuit having at least two test electrodes;
- (2) positioning the transfer device on the micro element connected to a carrier substrate;
- and
- (3) contacting the at least two test electrodes of the transfer device with one or more electrodes of the micro element to apply a test voltage on the test circuit to form a test hoop for testing the micro element and obtaining a defect pattern of the micro element on the carrier substrate.
Dependencies are inferred from the claim text.