Apparatus and method for plasma treatment of containers

An apparatus for plasma treating multiple containers, the apparatus comprising:

• a manifold comprising a first chamber and a second chamber;
• and
• multiple hollow, electrically-conductive nozzles for at least one of delivering or exhausting plasma-generating gas,
• wherein the manifold comprises a first plate having a first face, a second face, and a port extending therethrough, wherein the first chamber comprises:
• a first plurality of interconnected grooves formed in the first face of the first plate, wherein interconnections of the first plurality of interconnected grooves are located in the first face of the first plate;
• multiple outlet openings in the second face of the first plate;
• and
• multiple passages through the first plate that extend from the first face of the first plate to the second face of the first plate such that the multiple passages connect the first plurality of interconnected grooves to the multiple outlet openings;
• wherein the multiple hollow, electrically-conductive nozzles are connected to the multiple outlet openings and protrude from the second face of the first plate, and wherein the first plurality of interconnected grooves provides access to a supply of plasma-generating gas or a vacuum source and provides pathways for connecting the multiple hollow, electrically-conductive nozzles to the supply of plasma-generating gas or the vacuum source, and
• wherein the manifold further comprises an insulating block having a first face and a second face, wherein the second chamber comprises:
• a second plurality of interconnected grooves formed in the first face of the insulating block, the first face of the insulating block disposed adjacent the second face of the first plate, wherein interconnections of the second plurality of interconnected grooves are located in the first face of the insulating block,
• multiple second outlet openings in the second face of the insulating block;
• and
• multiple second passages through the insulating block that extend from the first face of the insulating block to the second face of the insulating block such that the multiple second passages connect the second plurality of interconnected grooves to the multiple second outlet openings, wherein the second plurality of interconnected grooves is in communication with the port in the first plate, wherein the multiple hollow, electrically-conductive nozzles protrude from the multiple second outlet openings in the second face of the insulating block, wherein if the first plurality of interconnected grooves provides access to the supply of plasma-generating gas and provides pathways for connecting the multiple hollow, electrically-conductive nozzles to the supply of plasma-generating gas, then the second plurality of interconnected grooves provides access to the vacuum source and provides pathways for connecting the multiple second passages to the vacuum source, and wherein if the first plurality of interconnected grooves provides access to the vacuum source and provides pathways for connecting the multiple hollow, electrically-conductive nozzles to the vacuum source, then the second plurality of interconnected grooves provides access to the supply of plasma-generating gas and provides pathways for connecting the multiple second passages to the supply of plasma-generating gas.