Spectroscope, and spectroscope production method
AssigneeHamamatsu Photonics K.K.
InventorsTakafumi Yokino, Katsumi Shibayama, Katsuhiko Kato
Life of this patent
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Abstract
A spectrometer includes a support having a bottom wall part in which a depression is provided and a side wall part, a light detection element supported by the side wall part while opposing the depression, a resin layer disposed at least on an inner surface of the depression, and a dispersive part provided in the resin layer on the inner surface of the depression. The resin layer is in contact with an inner surface of the side wall part. A thickness of the resin layer in a first direction in which the depression and the light detection element oppose each other is larger in a part in contact with the inner surface of the side wall part than in a part disposed on the inner surface of the depression.
Claims15
A spectrometer comprising:
- a support having a bottom wall part in which a depression including a concave curved inner surface is provided and a side wall part disposed on a side on which the depression is open with respect to the bottom wall part;
- a light detection element supported by the side wall part while opposing the depression;
- a resin layer disposed at least on the inner surface of the depression;
- and
- a dispersive part provided in the resin layer on the inner surface of the depression,
- wherein the resin layer is in contact with an inner surface of the side wall part, and
- a thickness of the resin layer in a first direction in which the depression and the light detection element oppose each other is larger in a part in contact with the inner surface of the side wall part than in a part disposed on the inner surface of the depression.
A method for manufacturing a spectrometer, the method comprising:
- a first step of preparing a support having a bottom wall part in which a depression including a concave curved inner surface is provided and a side wall part disposed on a side on which the depression is open with respect to the bottom wall part, and disposing a resin material on the inner surface of the depression;
- a second step of forming a resin layer having a grating pattern and in contact with an inner surface of the side wall part on the inner surface of the depression by pressing a mold die against the resin material and curing the resin material in this state after the first step;
- a third step of forming a dispersive part by forming a reflecting layer at least on the grating pattern after the second step;
- and
- a fourth step of supporting a light detection element by the side wall part such that the light detection element opposes the depression after the third step,
- wherein the resin layer is formed in the second step such that a thickness of the resin layer in a direction in which the depression and the light detection element oppose each other is larger in a part in contact with the inner surface of the side wall part than in a part disposed on the inner surface of the depression.
Dependencies are inferred from the claim text.