Dual-direction chemical delivery system for ALD/CVD chambers
AssigneeApplied Materials, Inc.
InventorsZhenbin Ge, Chien-Teh Kao, Joel M. Huston, Mei Chang
Life of this patent
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Abstract
Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectible with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.
Claims12
A gas delivery system configured to be connected to a first end and a second end of a gas delivery channel in a gas distribution plate, the gas delivery system comprising an inlet line that splits at a wye into a first inlet leg and a second inlet leg, a pump line connected to and in flow communication with the inlet line upstream of the wye through a bypass line, a first purge line leg in flow communication with the first inlet line leg and a second purge line leg in flow communication with the second inlet line leg.
Dependencies are inferred from the claim text.