US 10,396,752 B2 · MEMS device

Abstract

A MEMS device that suppresses variations in a resistance value caused by contracting vibrations in a direction in which a holding portion extends. The MEMS device includes a frame, a rectangular plate that receives an input of a driving signal, and holding portions that anchor the rectangular plate to the frame. The frame and the rectangular plate are both rectangular in shape. The holding portions are provided extending toward the frame from central areas of the opposing sides of the rectangular plate, and anchor the rectangular plate to the frame. A resistive film is formed in a region that follows a straight line connecting the holding portions that anchor the rectangular plate to the frame and that corresponds to no more than half a maximum displacement from a vibration distribution.

Claims20

Dependent claims

A MEMS device comprising:

a substrate;
a frame disposed on the substrate;
a plate including a piezoelectric layer and a pair of electrode films disposed on opposing surfaces of the piezoelectric layer, respectively, with the pair of electrodes including an upper electrode and a lower electrode closer to the substrate than the upper electrode;
a pair of holding portions disposed on opposing sides of the plate and anchoring the plate to the frame;
an insulating layer disposed on the plate;
and
a resistive film disposed on the insulating layer on a region of the insulating layer that extends along a straight line between the holding portions, such that the insulating layer electrically insulates the resistive film and at least one electrode film of the pair of electrode films,
wherein the insulating layer is disposed between the resistive film and the upper electrode of the pair of electrodes.

5 more elements

Dependencies are inferred from the claim text.

MEMS device

Life of this patent

MEMS device

Life of this patent

Abstract

Claims20