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US 10,395,884 B2Granted
Ruthenium encapsulated photocathode electron emitter
AssigneeKLA-Tencor Corporation
InventorsGildardo R. Delgado, Rudy F. Garcia, Katerina Ioakeimidi, Frances Hill, Michael E. Romero
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Abstract
A photocathode structure, which can include an alkali halide, has a protective film on an exterior surface of the photocathode structure. The protective film includes ruthenium. This protective film can be, for example, ruthenium or an alloy of ruthenium and platinum. The protective film can have a thickness from 1 nm to 20 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.
Claims20
An electron emitter comprising:
- a photocathode structure;
- and
- a protective film disposed on an exterior surface of the photocathode structure, wherein the protective film includes ruthenium, and wherein the protective film has a thickness from 1 nm to 20 nm.
A method comprising:
- providing a photocathode structure;
- depositing a protective film on an exterior surface of the photocathode structure, wherein the protective film includes ruthenium, and wherein the protective film has a thickness from 1 nm to 20 nm.
A method comprising:
- providing a photocathode structure, wherein the photocathode includes an alkali halide and a protective film disposed on an exterior surface of the photocathode structure, wherein the protective film includes ruthenium;
- and
- generating an electron beam from the photocathode structure when photons are directed at the photocathode structure.
Dependencies are inferred from the claim text.