Liquid material vaporizaton apparatus
AssigneeHORIBA STEC, Co., Ltd.
InventorsTaketoshi Ito, Masaki Inoue
Life of this patent
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Abstract
In order to eliminate liquid accumulation occurring between a gas-liquid mixing part and a vaporization part to stably perform liquid feeding to the vaporization part and vaporization in the vaporization part, a liquid material vaporization apparatus includes: a gas-liquid mixing part adapted to mix a liquid material and gas to produce a gas-liquid mixture; and a vaporization part adapted to heat the gas-liquid mixture to vaporize the liquid material. In addition, the gas-liquid mixing part has a gas-liquid mixture lead-out pipe for leading out the gas-liquid mixture, the vaporization part has a heating flow path HS for heating the gas-liquid mixture, and a lead-out port of the gas-liquid mixture lead-out pipe is arranged in the heating flow path HS.
Claims7
A liquid material vaporization apparatus comprising:
- a gas-liquid mixing part adapted to mix a liquid material and gas to produce a gas-liquid mixture;
- and
- a vaporization part adapted to heat the gas-liquid mixture to vaporize the liquid material, wherein:
- the gas-liquid mixing part has a gas-liquid mixture lead-out pipe for leading out the gas-liquid mixture;
- the vaporization part has a heating pipe forming a heating flow path for heating the gas-liquid mixture;
- a lead-out port of the gas-liquid mixture lead-out pipe is arranged in the heating flow path, and a fore end part of the gas-liquid mixture lead-out pipe forms a double pipe with the heating pipe such that an outer lateral surface of the gas-liquid mixture lead out pipe is separate from an inner lateral surface of the heating pipe;
- and
- the gas-liquid mixture lead-out pipe has:
- a uniform diameter along its length, or a nozzle at the fore end part of the gas-liquid mixture lead out pipe.
Dependencies are inferred from the claim text.