Micro heating plate device and sensor having a micro heating plate device
AssigneeRobert Bosch GmbH
InventorsChristoph Schelling, Richard Fix
Life of this patent
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Abstract
A micro-hotplate apparatus including a diaphragm carrier device; a diaphragm that at least in part spans at least one cavity embodied in the diaphragm carrier device; and at least one heating conductor disposed on and/or in the diaphragm, the micro-hotplate apparatus additionally encompassing at least one reflector element that is disposed on an inner side, directed toward the cavity, of the diaphragm, in such a way that by way of the at least one reflector element a thermal radiation emitted from the at least one heating conductor and/or from the diaphragm is reflectable at least in part back onto and/or into the diaphragm. A sensor having a micro-hotplate apparatus is also described.
Claims11
A micro-hotplate apparatus comprising:
- a diaphragm carrier device;
- a diaphragm that at least in part spans at least one cavity in the diaphragm carrier device;
- at least one heating conductor disposed one of on or in the diaphragm;
- and
- at least one reflector element disposed on an inner side, directed toward the cavity, of the diaphragm, in such a way that by way of the at least one reflector element a thermal radiation, emitted at least one of:
- i) from the at least one heating conductor, and ii) from the diaphragm, is reflectable at least in part back at least one of onto and into the diaphragm;
- wherein the diaphragm has patterns of plasmonic structures.
A micro-hotplate apparatus, comprising:
- a diaphragm carrier device;
- a diaphragm that at least in part spans at least one cavity in the diaphragm carrier device;
- at least one heating conductor disposed one of on or in the diaphragm;
- and
- at least one reflector element disposed on an inner side, directed toward the cavity, of the diaphragm, in such a way that by way of the at least one reflector element a thermal radiation, emitted at least one of:
- i) from the at least one heating conductor, and ii) from the diaphragm, is reflectable at least in part back at least one of onto and into the diaphragm;
- wherein the at least one reflector element has at least one pattern of plasmonic structures.
A sensor having a micro-hotplate apparatus, the micro-hotplate apparatus comprising:
- a diaphragm carrier device;
- a diaphragm that at least in part spans at least one cavity in the diaphragm carrier device;
- at least one heating conductor disposed one of on or in the diaphragm;
- and
- at least one reflector element disposed on an inner side, directed toward the cavity, of the diaphragm, in such a way that by way of the at least one reflector element a thermal radiation, emitted at least one of:
- i) from the at least one heating conductor, and ii) from the diaphragm, is reflectable at least in part back at least one of onto and into the diaphragm;
- wherein the diaphragm has patterns of plasmonic structures.
A sensor having a micro-hotplate apparatus, the micro-hotplate apparatus comprising:
- a diaphragm carrier device;
- a diaphragm that at least in part spans at least one cavity in the diaphragm carrier device;
- at least one heating conductor disposed one of on or in the diaphragm;
- and
- at least one reflector element disposed on an inner side, directed toward the cavity, of the diaphragm, in such a way that by way of the at least one reflector element a thermal radiation, emitted at least one of:
- i) from the at least one heating conductor, and ii) from the diaphragm, is reflectable at least in part back at least one of onto and into the diaphragm;
- wherein the at least one reflector element has at least one pattern of plasmonic structures.
Dependencies are inferred from the claim text.