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US 10,381,911 B2Granted
Linear motor, magnet unit, and stage device
AssigneeSumitomo Heavy Industries, Ltd.
InventorDoutaro Usui
Life of this patent
Estimating the term…
Abstract
A linear motor includes a movable element and a stator. The stator includes a pair of back yokes provided opposing each other such as to flank the movable element along a direction perpendicular to the movable element's axis of travel, a plurality of main pole magnets provided spaced apart from each other and paralleling the axis of travel, on respective inside lateral surfaces of the pair of back yokes, and first and second interpole magnets provided, adjoining along said axis of travel, in each of intervals between adjoining couples of the main pole magnets.
Claims6
A linear motor comprising:
- a movable element movable along a travel axis;
- and
- a stator, wherein the stator includes
- a pair of back yokes provided opposing each other such as to flank the movable element along a direction perpendicular to the travel axis,
- a plurality of main pole magnets each of travel-axis-directed width Wa, provided spaced apart from each other and paralleling said travel axis, on respective inside lateral surfaces of the pair of back yokes, and
- first and second interpole magnets each being a rectangular single-piece solid having two opposing surfaces perpendicular to said travel axis and provided, travel-axis directedly adjoining each other, in each of intervals between adjoining couples of the main pole magnets, the first interpole magnets each being of travel-axis-directed width Wc and the second interpole magnets each being of travel-axis-directed width Wd, and the first and second interpole magnets respectively having constant magnetization in the same direction, paralleling said travel axis.
3 more elements
A linear motor comprising:
- a movable element movable along a travel axis;
- and
- a stator, wherein the stator includes
- a pair of back yokes provided opposing each other such as to flank the movable element along a direction perpendicular to the travel axis,
- a plurality of main pole magnets provided spaced apart from each other and paralleling said travel axis, on respective inside lateral surfaces of the pair of back yokes, and
- first and second interpole magnets each being a rectangular single-piece solid and provided, travel-axis directedly adjoining each other, in each of intervals between adjoining couples of the main pole magnets, wherein the first and second interpole magnets each have two opposing surfaces perpendicular to said travel axis, and one of the two opposing surfaces of each of the first interpole magnets and one of the two opposing surfaces of each of second interpole magnets face against each other.
3 more elements
Dependencies are inferred from the claim text.