Spin orbit torque magnetoresistive random access memory containing shielding element and method of making thereof

A Spin Orbit Torque (SOT) Magnetoresistive Random Access Memory (MRAM) device, comprising:

• a first ferromagnetic shielding layer located over a substrate;
• a second ferromagnetic shielding layer located over the first ferromagnetic shielding layer;
• a word line located between the first and second ferromagnetic shielding layers;
• a bit line located between the first and second ferromagnetic shielding layers;
• a SOT MRAM cell located between and coupled to the word line and the bit line;
• and
• a ferromagnetic yoke electrically connecting the first and second ferromagnetic shielding layers.

A method for making a Magnetoresistive Random Access Memory (MRAM) assembly, comprising:

• depositing a first ferromagnetic shielding component over a substrate;
• depositing a first insulating layer over the first ferromagnetic shielding component;
• depositing a first conductive layer over the first insulating layer;
• patterning the first conductive layer to form a first layer of bit lines or word lines, the first layer of bit lines or word lines having an opening for a magnetic yoke;
• etching the first insulating layer exposed in the opening for the magnetic yoke to expose the first ferromagnetic shielding component;
• depositing ferromagnetic material into the etched opening to form a ferromagnetic yoke that is coupled to the first ferromagnetic shielding component;
• forming a plurality of MRAM cells on the first layer of bit lines or word lines;
• depositing a second insulating layer between the MRAM cells;
• depositing a second conductive layer over the MRAM cells;
• patterning the second conductive layer to form a second layer of the other one of the bit lines or the word lines;
• depositing a third insulating layer over the second layer of another one of bit lines or word lines;
• and
• depositing a second ferromagnetic shielding component over the third insulating layer in electrical contact with the ferromagnetic yoke.