Apparatus and method for controlling doping
AssigneeEmberion Oy
InventorsStefano Borini, Alan Colli
Life of this patent
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Abstract
An apparatus and method, the apparatus comprising: at least one charged substrate (3); a channel of two dimensional material (5); and at least one floating electrode (7A-C) wherein the floating electrode comprises a first area (10A-C) adjacent the at least one charged substrate, a second area (11A-C) adjacent the channel of two dimensional material and a conductive interconnection (9A-C) between the first area and the second area wherein the first area is larger than the second area and wherein the at least one floating electrode is arranged to control the level of doping within the channel of two dimensional material.
Claims10
An apparatus comprising:
- at least one charged substrate;
- a channel of two dimensional material provided between a source electrode and a drain electrode;
- and
- a plurality of electrically isolated floating electrodes provided adjacent to different portions of the channel of two dimensional material so that they overlap with the channel of two-dimensional material,
- wherein each electrically isolated floating electrode in the plurality of electrically isolated floating electrodes comprises a first area adjacent to the at least one charged substrate, a second area adjacent to the channel of two dimensional material, and a conductive interconnection between the first area and the second area, wherein the first area is larger than the second area.
A method comprising:
- providing at least one charged substrate;
- providing a channel of two dimensional material between a source electrode and a drain electrode;
- and
- controlling the level of doping within the channel of two dimensional material by providing a plurality of electrically isolated floating electrodes adjacent to different portions of the channel of two dimensional material so that they overlap with the channel of two-dimensional material, wherein each electrically isolated floating electrode in the plurality of electrically isolated floating electrodes comprises a first area adjacent to the at least one charged substrate, a second area adjacent to the channel of two dimensional material, and a conductive interconnection between the first area and the second area wherein the first area is larger than the second area.
Dependencies are inferred from the claim text.