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US 10,381,455 B1Granted
Diffusion barrier systems (DBS) for high temperature semiconductor electrical contacts
AssigneeThe United States of America as represented by the Administrator of the National Aeronautics and Space Administration
InventorRobert Okojie
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Abstract
A diffusion barrier system may prevent migration of gold, oxygen, or both on a plurality of ohmic contacts. The diffusion barrier system may include a first barrier system or a second barrier system. Each barrier system may include a first metallization layer, a second metallization layer, and a third metallization layer.
Claims14
An apparatus, comprising:
- a silicon carbide (SiC) substrate;
- an ohmic contact metallization layer disposed directly on the SiC substrate;
- a diffusion barrier stack disposed directly on the ohmic contact metallization layer, wherein the diffusion barrier stack comprises a platinum (Pt) layer and an additional layer formed of titanium (Ti) or tantalum silicide (TaSi2);
- and
- a contact pad disposed on the diffusion barrier stack, wherein the diffusion barrier stack is configured to prevent diffusion of free silicon into the contact pad during operation at a temperature of 600° C.
2 more elements
An apparatus, comprising:
- a silicon carbide (SiC) substrate;
- an ohmic contact metallization layer disposed directly on the SiC substrate;
- a diffusion barrier layer disposed on the ohmic contact metallization layer, wherein the diffusion barrier layer comprises platinum (Pt) and an additional material selected from the group consisting of titanium (Ti) and tantalum silicide (TaSi2);
- and
- a contact pad metallization layer disposed on the diffusion barrier layer, wherein the contact pad metallization layer is exposed to oxygen, wherein the diffusion barrier layer is configured to prevent diffusion of free silicon into the contact pad metallization layer during a period of operation at 600° C., wherein the diffusion barrier layer is configured to prevent diffusion of the oxygen into the ohmic contact metallization layer during the period of operation.
2 more elements
Dependencies are inferred from the claim text.