Array substrate, manufacture method thereof, display device

A display device, comprising an array substrate wherein the array substrate comprises sequentially:

• a substrate;
• an organic planar layer formed on the substrate;
• an oxide conductive layer on the organic planar layer;
• an inert metal layer on the oxide conductive layer, the inert metal layer being made from a material selected from the group consisting of Ta and Nb, or a combination thereof;
• a first electrode formed on the inert metal layer;
• a light-emitting functional layer, and a second electrode;
• wherein the first electrode is made from a material selected from the group consisting of a metal or metal alloy;
• and
• the organic planar layer has a thermal coefficient of expansion substantially same as that of the oxide conductive layer and the first electrode, respectively.

A method of manufacturing an array substrate, comprising:

• forming an organic planar layer;
• forming an oxide conductive layer on the organic planar layer;
• forming an inert metal layer on the oxide conductive layer, the inert metal layer being made from a material selected from the group consisting of Ta and Nb, or a combination thereof;
• forming a first electrode on the inert metal layer, wherein the first electrode is made from a material selected from the group consisting of a metal electrode or metal alloy electrode;
• and
• forming a light-emitting functional layer and a second electrode sequentially on the first electrode;
• and
• wherein the organic planar layer has a thermal coefficient of expansion substantially same as that of the oxide conductive layer and the first electrode, respectively.