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US 10,381,365 B2Granted
Integrated structures containing vertically-stacked memory cells
AssigneeMicron Technology, Inc.
InventorsHaitao Liu, Chandra Mouli, Sergei Koveshnikov, Dimitrios Pavlopoulos, Guangyu Huang
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Abstract
Some embodiments include an integrated structure having a stack of alternating dielectric levels and conductive levels, and having vertically-stacked memory cells within the conductive levels. An opening extends through the stack. Channel material is within the opening and along the memory cells. At least some of the channel material contains germanium.
Claims5
An integrated structure comprising, along a cross-section:
- a stack of alternating dielectric levels comprising a dielectric material and conductive levels that comprise a conductive material that physically contacts the dielectric material;
- vertically-stacked memory cells within the conductive levels, the vertically-stacked memory cells comprising a charge trapping region and an insulative material within the conductive levels;
- an opening extending through the stack, the opening having a continuous vertical sidewall along the dielectric material and the insulative material;
- non-germanium-containing channel material liners along sidewalls of the opening and along the memory cells, the non-germanium-containing channel material liners being in direct contact with the dielectric material and the insulative material and comprising one or more members of the group consisting of silicon carbide, tin oxide, gallium arsenide, zinc oxide and indium oxide;
- germanium-containing channel material liners within the opening and along the non-germanium-containing material liners;
- and
- an insulator-filled hollow within the opening and between the germanium-containing liners.
4 more elements
Dependencies are inferred from the claim text.