Assessment method, and semiconductor device manufacturing method
AssigneeFuji Electric Co., Ltd.
InventorsYasushi Niimura, Hideki Shishido, Takayuki Shimatou, Toshihiro Arai
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AssigneeFuji Electric Co., Ltd.
InventorsYasushi Niimura, Hideki Shishido, Takayuki Shimatou, Toshihiro Arai
Estimating the term…
To easily assess a feedback capacitance of a semiconductor element. An assessment method of assessing a feedback capacitance of a semiconductor element is provided, the assessment method including: acquiring a first characteristic correlated with the feedback capacitance and a second characteristic correlated with the feedback capacitance; and assessing the feedback capacitance based on the first characteristic and the second characteristic. The first characteristic may be a characteristic that corresponds to a withstanding voltage of the semiconductor element, and the second characteristic may be an on-resistance of the semiconductor element. In the assessing, the feedback capacitance may be assessed based on a ratio between the first characteristic and the second characteristic.
An assessment method of assessing a feedback capacitance of a semiconductor element, the assessment method comprising:
A semiconductor device manufacturing method, comprising:
Dependencies are inferred from the claim text.