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US 10,381,270 B2Granted
Gate device over strained fin structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorJhon Jhy Liaw
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Abstract
A method for forming a semiconductor device includes forming a fin structure on a substrate, forming a shallow trench isolation region adjacent the fin structure so that an upper portion of the fin structure is exposed, forming a dummy gate over the exposed fin structure, forming an interlayer dielectric layer around the dummy gate, removing the dummy gate to expose the fin structure, and after removing the dummy gate, introducing a strain into a crystalline structure of the exposed fin structure.
Claims20
A method for forming a semiconductor device, the method comprising:
- forming a first fin structure and second fin structure onto a substrate;
- forming an isolation structure between the first and second fin structures;
- applying a Chemical Mechanical Polishing (CMP) process to the substrate including the first and second fin structures to form a planar surface including the first fin structure, the second fin structure, and the isolation structure;
- after applying the CMP, forming a first dummy gate over a first region of the planar surface including the first fin structure and a first portion of the isolation structure and forming a second dummy gate over a second region of the planar surface including the second fin structure and a second portion of the isolation structure, wherein a third region of the planar surface including the isolation structure interposes the first region and the second region;
- forming an interlayer dielectric (ILD) layer and spacers on the third region of the planar surface and around the first and second dummy gates, wherein the spacers surrounding each of the first and second dummy gates include a first spacer on a first end wall and a second spacer on a second end wall of the first dummy gate;
- removing the first and second dummy gates to form two first openings opening while maintaining the ILD layer and spacers on the third region of the planar surface;
- after removing the first and second dummy gates, selectively removing a top portion of the first and second fin structures in the first opening to form a second opening above the first fin structure and a third opening above the second fin structure, wherein each of the second opening and the third opening have sidewalls defined by the isolation structure;
- in one of the second or third openings, forming a strained fin structure;
- after forming the strained fin structure and while the ILD layer and spacers are disposed on the third region of the planar surface, removing an upper portion of the isolation structure including portions of the first and second regions of the planar surface to expose an upper portion of the strained fin structure, wherein the removing the upper portion includes forming a recess in the isolation structure aligned with the first and second spacers and exposing the upper portion of the strained fin structure, wherein an edge of the recess aligned with the first spacer is parallel a first sidewall of the exposed upper portion of the strained fin structure;
- and
- forming a metal gate over the exposed upper portion of the strained fin structure and interfacing the first sidewall.
8 more elements
A method for forming a semiconductor device, the method comprising:
- forming a first fin structure and a second fin structure extending from a substrate, wherein the first fin structure and second fin structure each comprises a first semiconductor material and wherein the first semiconductor material defines a top surface of the first fin structure of the first semiconductor material;
- forming an isolation structure adjacent the first fin structure, wherein a first portion of the isolation structure is on a first side of the first fin structure, a second portion of the isolation structure is on a second side of the first fin structure opposite the first side and between the first fin structure and the second fin structure, and a third portion of the isolation structure is on a third side of the second fin structure opposite the second portion of the isolation structure, wherein a top surface of the first portion of the isolation structure, the top surface of the first fin structure, a top surface of the second portion of the isolation structure, a top surface of the second fin structure, and a top surface of the third portion of the isolation structure are coplanar and form an exposed surface;
- forming a single dummy gate over the first fin structure, the second fin structure and the first, second and third portions of the isolation structure, wherein the single dummy gate interfaces a first portion of the exposed surface and has a first end over the third portion of the isolation structure and a second end over the first portion of the isolation structure;
- forming a spacer surrounding the single dummy gate including on the first end and the second end and forming an inter layer dielectric (ILD) layer interfacing a second portion of the exposed surface;
- after removing the single dummy gate, selectively etching a top portion of the first fin structure to form a trench between the first and second portions of the isolation structure and selectively etching a top portion of the second fin structure to form another trench between the second portion and the third portion of the isolation structure;
- epitaxially growing a second semiconductor material in the trench and the another trench;
- recessing the isolation structure to expose a top portion of the epitaxially grown second semiconductor material, wherein the recessing forms a recess having a sidewall aligned with the spacer formed on the first end and another sidewall aligned with the spacer formed on the second end of the single dummy gate;
- and
- forming a gate structure over the epitaxially grown second semiconductor material and interfacing the spacer and interfacing the sidewall of the recess.
6 more elements
A method for forming a semiconductor device, the method comprising:
- providing a substrate having a first fin structure, a second fin structure and an isolation structure disposed on the substrate;
- wherein a top surface of the first fin structure, a top surface of the second fin structure and a top surface of the isolation structure are coplanar;
- forming a first dummy gate structure over the first fin structure and forming a second dummy gate structure over the second fin structure;
- forming spacer elements surrounding the first dummy gate structure and surrounding the second dummy gate structure;
- removing the first dummy gate structure and the second dummy gate structure while maintaining the spacer elements;
- after removing the first dummy gate structure and the second dummy gate structure, etching a top portion of the first fin structure to form a first trench having sidewalls defined by a first portion of the isolation structure and a bottom surface defined by a remaining portion of the first fin structure;
- epitaxially growing a first semiconductor material in the first trench to form an upper fin portion over the remaining portion of the first fin structure;
- etching a top portion of the second fin structure to form a second trench having sidewalls defined by a second portion of the isolation structure and a bottom surface defined by a remaining portion of the second fin structure;
- epitaxially growing a second semiconductor material in the first trench to form another upper fin portion over the remaining portion of the first fin structure, wherein the another upper fin portion has a different strain than the upper fin portion;
- after epitaxially growing the second semiconductor material, recessing a first region of the isolation structure adjacent the upper fin portion, while a second region of the isolation structure spaced a distance from the upper fin portion underlies the spacer elements, wherein the recessed first region of the isolation structure has a first sidewall aligned with a first spacer element of the spacer elements and a second sidewall aligned with a second spacer element of the spacer elements;
- and
- forming a gate structure over the upper fin portion and the recessed first region of the isolation structure, wherein a bottom portion of the gate structure interfaces the first sidewall and an upper portion of the gate structure has a first sidewall that interfaces the first spacer element of the spacer elements, and a second sidewall opposing the first sidewall that interfaces the second spacer element of the spacer elements, wherein in a cross-sectional view along a plane perpendicular a top surface of the substrate, the gate structure, the first fin structure, and a third fin structure interpose the first spacer element and the second spacer element.
9 more elements
Dependencies are inferred from the claim text.