Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction

A substrate conveying robot for holding and conveying a substrate, comprising:

• a robot arm;
• a substrate holding device mounted on the robot arm;
• and
• a controller configured to control the robot arm and the substrate holding device,
• wherein the substrate holding device has a plurality of hands, one of the hands having one blade member configured to hold one substrate, an other of the hands having an other blade member configured to hold an other substrate, the one blade member and the other blade member being arranged in a vertical direction,
• wherein the substrate holding device further has a blade elevating unit disposed inside the one of the hands and configured to move only the one blade member in the vertical direction with respect to the other blade member,
• wherein the controller is configured to make the robot arm and the substrate holding device execute, in a state that one of the one blade member and the other blade member is made into a substrate holding state and an other of the one blade member and the other blade member is made into a substrate non-holding state, a blade member advancing operation of advancing the one blade member and the other blade member into a substrate placing structure having an upper stage and a lower stage, a substrate receiving operation of receiving a substrate placed on one of the upper stage and the lower stage by the blade member in the substrate non-holding state, and a substrate placing operation of placing the substrate of the blade member in the substrate holding state on an other of the upper stage and the lower stage,
• wherein the substrate holding device is configured to be capable of being switched between a first working state that the one blade member and the other blade member are arranged in the vertical direction and a second working state that the one blade member and the other blade member are arranged in a position out of the vertical direction and a single blade member is configured to advance into the substrate placing structure, and
• wherein the one blade member and the other blade member have a common rotational axis and are configured to be independently rotated about the common rotational axis relative to each other.