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US 10,381,249 B2Granted
Substrate container, load port apparatus, and substrate treating apparatus
AssigneeSCREEN Holdings Co., Ltd.
InventorsKazuhiro Honsho, Mitsukazu Takahashi, Akito Hatano, Koji Hashimoto
Life of this patent
Estimating the term…
Abstract
A substrate container includes a casing, a rack, a lid, a lid holder, and a substrate separating mechanism. The casing has on its front face an opening. The substrate separating mechanism has a contact part that directly contacts substrates. The contact part is movable relative to the lid holder. The lid moves forward to the opening, and the contact part moves backward relative to the lid holder, whereby the lid holder holds ends of the substrates. The lid moves backward from the opening, and the contact part moves forward to the lid holder, whereby the substrate separating mechanism separates the substrates from the lid holder.
Claims10
A substrate container, comprising:
- a casing with an opening on a front face of the casing that accommodates substrates therein;
- a rack inside the casing on which the substrates are disposed in a substantially horizontal attitude;
- a lid that is attached to the casing and detached from the casing and opens and closes the opening;
- a lid holder attached to a rear face of the lid that holds ends of the substrates;
- a substrate separating mechanism attached to the rear face of the lid that separates from the lid holder the substrates held with the lid holder, and including a contact part that directly contacts the substrates, and
- a stopper provided in the casing for restricting forward movement of the contact part from a given position within the casing through contact to the substrate separating mechanism,
- wherein
- the contact part is movable relative to the lid holder,
- the lid moves forward to the opening, and the contact part moves backward relative to the lid holder, whereby the lid holder holds the ends of the substrates, and
- the lid moves backward from the opening, and the contact part moves forward relative to the lid holder, whereby the substrate separating mechanism separates the substrates from the lid holder.
7 more elements
A load port apparatus, comprising:
- a mount table;
- a substrate container which is placeable on the mount table;
- and
- an open and close mechanism that opens and closes a lid of the substrate container on the mount table, wherein
- the substrate container comprises:
- a casing with an opening on a front face of the casing that accommodates substrates therein;
- a rack inside the casing on which the substrates are disposed in a substantially horizontal attitude;
- a lid that is attached to the casing and detached from the casing and opens and closes the opening;
- a lid holder attached to a rear face of the lid that holds ends of the substrates;
- a substrate separating mechanism attached to the rear face of the lid that separates from the lid holder the substrates held with the lid holder, and including a contact part that directly contacts the substrates, and
- a stopper provided in the casing for restricting forward movement of the contact part from a given position within the casing through contact to the substrate separating mechanism, and wherein
- the contact part is movable relative to the lid holder,
- the lid moves forward to the opening, and the contact part moves backward relative to the lid holder, whereby the lid holder holds the ends of the substrates, and
- the lid moves backward from the opening, and the contact part moves forward relative to the lid holder, whereby the substrate separating mechanism separates the substrates from the lid holder.
11 more elements
A substrate treating apparatus, comprising:
- a mount table;
- a substrate container which is placeable on the mount table;
- and
- an open and close mechanism that opens and closes a lid of the substrate container on the mount table;
- a treating unit that treats substrates;
- and
- a transport mechanism that transports the substrates from the substrate container on the mount table to the treating unit, wherein
- the substrate container comprises:
- a casing with an opening on a front face of the casing that accommodates substrates therein;
- a rack inside the casing on which the substrates are disposed in a substantially horizontal attitude;
- a lid that is attached to the casing and detached from the casing and opens and closes the opening;
- a lid holder attached to a rear face of the lid that holds ends of the substrates;
- a substrate separating mechanism attached to the rear face of the lid that separates from the lid holder the substrates held with the lid holder, and including a contact part that directly contacts the substrates, and
- a stopper provided in the casing for restricting forward movement of the contact part from a given position within the casing through contact to the substrate separating mechanism, and wherein the substrates,
- the contact part is movable relative to the lid holder,
- the lid moves forward to the opening, and the contact part moves backward relative to the lid holder, whereby the lid holder holds the ends of the substrates, and
- the lid moves backward from the opening, and the contact part moves forward relative to the lid holder, whereby the substrate separating mechanism separates the substrates from the lid holder.
14 more elements
Dependencies are inferred from the claim text.