Gas systems and methods for chamber ports

An electronic device manufacturing system, comprising:

• a process chamber configured to receive a substrate therein;
• a transfer chamber configured to receive the substrate therein;
• and
• a chamber port assembly interfacing the process chamber with the transfer chamber, the chamber port assembly including:
• a frame and a frame insert coupled thereto,
• a lid coupled to the frame insert, wherein the lid includes a first gas passageway therein and a gas inlet in fluid communication with the first gas passageway, and
• a substrate transfer area between the process chamber and the transfer chamber, the substrate transfer area including an opening in the frame insert configured to receive the substrate as the substrate is transferred through the chamber port assembly between the process chamber and the transfer chamber;
• a slit valve mechanism including a slit valve door configured to be sealed against the opening in the frame insert when the slit valve door is in a closed position;
• a gas conduit member, coupled between the lid and the frame insert, having a second gas passageway therethrough in fluid communication with the gas inlet;
• and
• one or more gas nozzles in the frame insert configured to direct a flow of gas received at the gas inlet into the substrate transfer area.

An electronic device manufacturing system, comprising:

• a first chamber configured to receive a substrate therein;
• a second chamber configured to receive the substrate therein;
• a chamber port assembly interfacing the first chamber with the second chamber, the chamber port assembly having a substrate transfer area between the first chamber and the second chamber, the substrate transfer area configured to receive the substrate as the substrate is transferred through the chamber port assembly between the first chamber and the second chamber;
• a frame disposed within the chamber port assembly;
• a frame insert coupled to the frame;
• a lid having a first gas passageway therein, and a plurality of through-holes each configured to receive a fastener, wherein the lid is coupled to the frame insert;
• a gas conduit member having a second gas passageway therethrough, and the second gas passageway in fluid communication with a gas inlet;
• and
• wherein the first chamber comprises the gas inlet, the gas conduit member, and one or more gas nozzles, the one or more gas nozzles disposed proximate a chamber port of the first chamber, the chamber port configured to interface the chamber port assembly.