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US 10,381,246 B2Granted
Substrate processing apparatus
AssigneeTokyo Electron Limited
InventorsSatoshi Okamura, Satoshi Biwa
Life of this patent
Estimating the term…
Abstract
Disclosed is a substrate processing apparatus including: a container body configured to accommodate a substrate and perform a processing on the substrate using a high-pressure processing fluid; a conveyance port configured to carry the substrate into and out of the container body; an opening formed in the container body at a position different from the conveyance port; and a cover member configured to close the opening.
Claims12
A substrate processing apparatus comprising:
- a container body configured to accommodate a substrate and perform a processing on the substrate using a high-pressure processing fluid;
- a conveyance port formed in the container body and configured to carry the substrate into and out of the container body;
- an opening formed in the container body at a position different from the conveyance port;
- a cover configured to close the opening;
- and
- a lock plate configured to lock a position of the cover;
- wherein the container body includes a fitting hole adjacent the opening configured to allow the lock plate to be fitted into the fitting hole so as to lock the position of the cover to regulate movement of the cover due to a pressure in the container body.
4 more elements
A substrate processing apparatus comprising:
- a container body configured to accommodate a substrate and perform a processing on the substrate using a high-pressure processing fluid;
- a conveyance port formed in the container body and configured to carry the substrate into and out of the container body;
- an opening formed in the container body at a position different from the conveyance port;
- a first cover configured to close the conveyance port;
- a second cover configured to close the opening;
- a first regulator configured to regulate movement of the first cover due to a pressure in the container body;
- and
- a second regulator configured to regulate movement of the second cover due to the pressure in the container body.
5 more elements
Dependencies are inferred from the claim text.