Back to results
US 10,381,215 B2Granted
Target for ultraviolet light generation, and method for manufacturing same
AssigneeHamamatsu Photonics K.K.
InventorsKohei Ikeda, Norio Ichikawa, Hiroyuki Taketomi
Life of this patent
Estimating the term…
Abstract
A target for ultraviolet light generation 20A includes a sapphire substrate 21 that transmits ultraviolet light UV, an interlayer 22 that is in contact with the sapphire substrate 21, includes oxygen atoms and aluminum atoms in a composition, and transmits ultraviolet light UV, and a luminous layer 23 that is provided on the interlayer 22, includes oxide crystals containing rare earth elements to which an activator agent is added, and receives electron beams EB so as to generate ultraviolet light UV.
Claims8
A target for ultraviolet light generation comprising:
- a sapphire substrate that transmits ultraviolet light,
- an interlayer that is in contact with the sapphire substrate, includes oxygen atoms and aluminum atoms in a composition, and transmits ultraviolet light;
- and
- a luminous layer that is provided on the interlayer, includes oxide crystals containing rare earth elements to which an activator agent is added, and receives electron beams so as to generate ultraviolet light,
- wherein the interlayer is formed by fine structures made of aluminum oxide aggregated together, bonded to one another, and integrated.
2 more elements
Dependencies are inferred from the claim text.