Laminated ultra-high vacuum forming device

An ultra-high vacuum creating device, comprising:

• at least one ion pump (100),
• wherein the ion pump (100) includes:
• a casing (110) which has at least one opening (111, 112);
• a plate-shaped electrode group (120) which is arranged inside the casing (110) and has a structure in which a center opening (120a) is formed along a predetermined central axis (C), wherein the plate-shaped electrode group 120 is configured to include spiral-shaped or honeycomb-shaped (hexagonal lattice shaped) electrodes (121) connected at intervals;
• a pair of plate-shaped electrodes (131, 132) which is arranged at positions inside the casing (110) such that the electrode group (120) is sandwiched between the pair of plate-shaped electrodes (131, 132);
• and
• a pair of plate-shaped magnets (141, 142) which is arranged at positions such that the pair of plate-shaped electrodes (131, 132) is sandwiched between the pair of plate-shaped magnets (141, 142) from both sides and applies a magnetic field inside the casing (110);
• at least one heating and non-evaporating getter pump (200),
• wherein the heating and non-evaporating getter pump (200) includes
• a second casing (210) which has at least one second opening (211, 212);
• a heater (220) which is arranged inside the second casing (210);
• and
• a pair getter materials (231, 232) which is arranged at positions inside the second casing (210) such that the heater (220) is sandwiched between the pair of getter materials (231,232) and is activated when being heated by radiant heat from the heater (220), and
• the at least one second opening (211, 212) of the heating and non-evaporating getter pump (200) communicates with the at least one second opening (111, 112) the ion pump (100);
• a relay casing member (117) being arranged between upper casing member (213) of the heating and non-evaporating getter pump (200) and lower casing member (115) of the ion pump (100), and
• a magnetic shield (150) housing the casing 110 and the plate-shaped magnets 141 and 142 therein and preventing magnetism of the plate-shaped electrodes (131, 132) from leaking outside the casing (110).