Magnetron and magnetron sputtering device

A magnetron, comprising:

• an inner magnetic pole;
• and
• an outer magnetic pole with opposite polarities,
• wherein the inner magnetic pole is formed of three spiral lines including a first inner magnetic pole spiral line, a second inner magnetic pole spiral line and a third inner magnetic pole spiral line;
• wherein the outer magnetic pole is formed of three spiral lines, which are respectively, a first outer magnetic pole spiral line, a second outer magnetic pole spiral line, and a third outer magnetic pole spiral line,
• wherein the spiral lines of the inner magnetic pole and the spiral lines of the outer magnetic pole have a same spiral center, each of the spiral lines has a first end close to the spiral center and a second end spirally extending outwards around the spiral center;
• wherein the second outer magnetic pole spiral line is the farthest spiral line from a spiral center, and wherein an open gap is provided between the first outer magnetic pole spiral line and the third outer magnetic pole spiral line,
• wherein the second end of the second inner magnetic pole spiral line and the second end of the third inner magnetic pole spiral line are merged, and the merged second end of the second inner magnetic pole spiral line and the third inner magnetic pole spiral line extends along a track of the second inner magnetic pole spiral line;
• wherein the second end of the first inner magnetic pole spiral line and the first end of the second inner magnetic pole spiral line are connected by an arc line, the arc line and the spiral lines satisfy different polar coordinate equations;
• wherein the spiral lines of the inner magnetic pole are surrounded by the spiral lines of the outer magnetic pole, and a gap is provided between the inner magnetic pole and the outer magnetic pole, and wherein the gap has different widths at different positions from the spiral center to a spiral periphery, the different positions of the gap from the spiral center to the spiral periphery refer to different positions of the gap from an end close to the spiral center to an end far from the spiral center, and
• wherein the spiral lines of the outer magnetic pole and the spiral lines of the inner magnetic pole satisfy the following polar coordinate equation:
• r=a×θn+b×(cos θ)m+c×(tan θ)k+d
• where r and θ are polar coordinates;
• a, b, c, d are constants;
• 0≤n≤2, 0≤m≤2, c=0 or k=0.