Transformer, plasma processing apparatus, and plasma processing method
AssigneeTokyo Electron Limited
InventorYohei Yamazawa
Life of this patent
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Abstract
A transformer includes: a rotary shaft configured to rotate about a central axis of the rotary shaft as a rotational axis; a primary-side first coil configured to extend around a first axis perpendicular to the central axis; a secondary-side second coil configured to extend around a second axis and supported by the rotary shaft, the second axis being perpendicular to the rotational axis in an area surrounded by the first coil; and a secondary-side third coil configured to extend around a third axis and supported by the rotary shaft, the third axis being perpendicular to the rotational axis and forming a predetermined angle with the second axis in the area.
Claims24
A transformer for a plasma processing apparatus comprising:
- a cylindrical rotary shaft configured to rotate about a central axis of the rotary shaft as a rotational axis;
- a pair of plate-shaped first support members facing each other and being connected with each other by support columns interposed between the pair of first support members, the pair of first support members intersecting with the central axis, and the rotary shaft being rotatably supported by the pair of first support members;
- a pair of disk-shaped second support members facing each other and being installed between the pair of first support members, the pair of second support members intersecting with the central axis and being fixed to the rotary shaft;
- a pair of disk-shaped third support members facing each other and being installed between the pair of second support members, the pair of third support members intersecting with the central axis and being fixed to the rotary shaft;
- a primary-side first coil wound around a first axis so as to alternately pass through an outer side of one of the pair of first support members and an outer side of the other of the pair of first support members, the first axis being perpendicular to the central axis and intersecting with the central axis at a point in a middle of the pair of first support members;
- a secondary-side second coil wound around a second axis so as to alternately pass through an outer side of one of the pair of second support members and an outer side of the other of the pair of second support members, the second axis being perpendicular to the central axis and intersecting with the central axis at a point in an area surrounded by the primary-side first coil;
- and
- a secondary-side third coil wound around a third axis so as to alternately pass through an outer side of one of the pair of third support members and an outer side of the other of the pair of third support members, the third axis being perpendicular to the rotational central axis and intersecting with the central axis at a point in an area surrounded by the primary-side first coil,
- wherein the secondary-side second coil and the secondary-side third coil are configured to rotate about the central axis by rotation of the rotary shaft, and the second axis and the third axis form a predetermined angle between the second axis and the third axis.
Dependencies are inferred from the claim text.