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AssigneesTESCAN Brno, s.r.o., Tescan Tempe, LLC.
InventorsPetras Stanislav, Lencova Bohumila, Benner Gerd Ludwig
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The object of the present invention provides a scanning transmission electron microscope with the ability to formed at least one diffraction pattern. The scanning electron microscope comprises an electron source, which is configured to provide primary electron beam, a condenser lens system, an objective electromagnetic system, a projection lens system and a detection system, in addition, the objective electromagnetic lens consists of an upper pole piece and a lower pole piece, wherein each pole piece comprises a pole piece face, which is a flat surface oriented towards a sample plane. A salient feature of the present invention is to form at least one diffraction pattern located in the distance from the lower pole piece face outside the pole piece gap, wherein the pole piece gap is the space between the upper pole piece face and the lower pole piece face.
A scanning transmission electron microscope comprising an electron source configured to provide a primary electron beam with cross-over, a condenser system, an objective electromagnetic lens comprising an upper pole piece and a lower pole piece forming a pole piece gap configured to provide a pre-field and a post-field with respect to a sample plane located inside the pole piece gap, wherein the upper pole piece comprises an upper pole piece face and the lower pole piece comprises a lower pole piece face, the scanning transmission electron microscope further comprising a projection lens system comprising at least a first projection lens and a second projection lens, and a detection system, wherein at least one diffraction pattern is located in a distance from the lower pole piece face outside the pole piece gap, wherein the distance between the lower pole piece face and the at least one diffraction pattern is in the interval (0-1) mm.
A method of providing double diffraction pattern, bright field image and dark field image in a scanning transmission electron microscope comprising an electron source configured to provide a primary electron beam with cross-over, a condenser system, an objective electromagnetic lens comprising an upper pole piece and a lower pole piece configured to provide a pre-field and a post-field, wherein the upper pole piece comprises an upper pole piece face and the lower pole piece comprises a lower pole piece face, a sample plane, a projection lens system and a detection system, the method comprises the steps of:
A method of providing single diffraction pattern, bright field image and dark field image in a scanning transmission electron microscope comprising an electron source configured to provide a primary beam with cross-over, a condenser system, an objective electromagnetic lens comprising an upper pole piece and a lower pole piece configured to provide a pre-field and a post-field with respect to a sample plane located inside a pole piece gap, wherein the upper pole piece comprises an upper pole piece face and the lower pole piece comprises a lower pole piece face, a projection lens system and a detection system, wherein the post-field provided by the objective electromagnetic lens is comprised of a single lens, the method comprises the steps of:
Dependencies are inferred from the claim text.