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US 10,381,191 B2Granted
Sample holder unit and sample observation apparatus
AssigneeJEOL Ltd.
InventorsShogo Kataoka, Akio Isono
Life of this patent
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Abstract
A sample holder unit includes a sample holding portion, a shielding plate, and a rotating mechanism. The rotating mechanism supports the sample and the shielding plate and allows the sample and the shielding plate to rotate. The rotating mechanism is oriented such that an axis of rotation thereof is parallel to both a processing surface of the sample and a direction orthogonal to a direction of projection of the sample from the shielding plate. A center of rotation of the rotating mechanism resides on the processing surface of the sample.
Claims7
A sample holder unit comprising:
- a sample holding portion that holds a sample;
- a shielding plate that is provided on one side of the sample holding portion and covers part of a processing surface of the sample;
- and
- a rotating mechanism that supports the sample held by the sample holding portion and the shielding plate and allows the sample and the shielding plate to rotate,
- wherein the sample holding portion holds the sample such that part of the sample projects from the shielding plate,
- wherein the rotating mechanism is oriented such that an axis of rotation of the rotating mechanism is parallel to both the processing surface of the sample held by the sample holding portion and a direction orthogonal to a direction of projection of the sample from the shielding plate, and
- wherein a center of rotation of the rotating mechanism resides on the processing surface of the sample held by the sample holding portion.
4 more elements
A sample observation apparatus comprising:
- a sample holder unit that holds a sample;
- an attaching stage to which the sample holder unit is detachably attached;
- and
- an observation unit that faces toward the attaching stage and through which the sample held by the sample holder unit is observed,
- wherein the sample holder unit comprises
- a sample holding portion that holds the sample;
- a shielding plate that is provided on a side nearer to the observation unit than the sample holding portion and covers part of a processing surface of the sample;
- and
- a rotating mechanism that supports the sample held by the sample holding portion and the shielding plate and allows the sample and the shielding plate to rotate,
- wherein the sample holding portion holds the sample such that part of the sample projects from the shielding plate,
- wherein the rotating mechanism is oriented such that an axis of rotation of the rotating mechanism is orthogonal to an optical axis of the observation unit and is parallel to a direction orthogonal to a direction of projection of the sample from the shielding plate, and
- wherein a center of rotation of the rotating mechanism resides on the processing surface of the sample held by the sample holding portion.
9 more elements
Dependencies are inferred from the claim text.