Radiation source device, lithographic apparatus and device manufacturing method
AssigneeASML Netherlands B.V.
InventorsArjen Teake De Jong, Robertus Wilhelmus Veltman, Reinier Theodorus Martinus Jilisen
Life of this patent
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Abstract
A radiation source, e.g. for EUV for use in a lithographic apparatus, generates radiation by illuminating droplets of fuel with first radiation to form a plasma and collects second radiation omitted by the plasma using a collector (CO). The collector has an aperture and the fuel passes along a vertical trajectory through that aperture before being irradiated by the first radiation. In an embodiment the first radiation is directed along a beam, the final part of which is coincident with the final part of the trajectory of the fuel droplets. In an embodiment a gas flow is arranged coincident with the fuel trajectory and/or the beam of first radiation.
Claims18
A radiation source comprising:
- a fuel dispenser configured to emit fuel along a fuel trajectory having an axis extending in a first direction, the fuel dispenser comprising an outlet opening operative to emit the fuel along the trajectory;
- a beam guiding system configured to direct first radiation in a first beam to a first focal point located on the fuel trajectory, wherein fuel at the first focal point is excited by the first radiation into a plasma that emits second radiation and an axis of the first beam extending in a second direction has a directional component in the first direction;
- and
- a collector arranged to collect the second radiation and direct it in a second beam to a second focal point, at least part of the collector arranged between the outlet opening and the first focal point and between at least part of the beam guiding system and the first focal point such that the fuel passes the at least part of the collector toward the first focal point and the first beam passes the same at least part of the collector toward the first focal point.
A radiation source comprising:
- a fuel dispenser configured to emit fuel along a fuel trajectory;
- a beam guiding system configured to direct first radiation in a first beam to a first focal point located on the fuel trajectory, wherein fuel at the first focal point is excited by the first radiation into a plasma that emits second radiation;
- a concave collector arranged to collect the second radiation and direct it to a second focal point, wherein the collector has an aperture through which the first beam is directed;
- and
- a solid wall located at the concave side of the collector, the wall surrounding the aperture and extending towards the first focal point, the wall having an aperture configured to pass the first beam from the aperture of the collector toward the first focal point, and the wall further having an opening, defined in a surface of the wall, configured to provide gas toward the first focal point.
Dependencies are inferred from the claim text.