Configuring optical layers in imprint lithography processes
AssigneeMolecular Imprints, Inc.
InventorsVikramjit Singh, Michael N. Miller, Frank Y. Xu, Christopher Fleckenstein
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Abstract
An imprint lithography method of configuring an optical layer includes depositing a set of droplets atop a side of a substrate in a manner such that the set of droplets do not contact a functional pattern formed on the substrate. The imprint lithography method further includes curing the set of droplets to form a spacer layer associated with the side of the substrate and of a height selected such that the spacer layer can support a surface adjacent the substrate and spanning the set of droplets at a position spaced apart from the functional pattern.
Claims19
An imprint lithography method of configuring an optical layer, the imprint lithography method comprising:
- depositing a first set of droplets atop a side of a substrate in a manner such that the first set of droplets does not contact a functional pattern formed on the substrate;
- curing the first set of droplets to form a first portion of a spacer layer associated with the side of the substrate;
- after the first set of droplets is cured, depositing a second set of droplets atop the side of the substrate such that each droplet of the second set of droplets is respectively dispensed directly atop a droplet of the first set of droplets;
- and
- curing the second set of droplets directly atop the first set of droplets to form a second portion of the spacer layer that increases a height of the spacer layer such that the spacer layer can support a surface adjacent the substrate and spanning the first and second sets of droplets at a position spaced apart from the functional pattern,
- wherein a first number of droplets in the first set of droplets is unequal to a second number of droplets in the second set of droplets such that the height of the spacer layer is variable.
An optical layer, comprising:
- a substrate;
- a functional pattern formed on the substrate;
- and
- a set of spacers disposed on a side of the substrate and spaced apart from the functional pattern,
- wherein the set of spacers forms a spacer layer associated with the side of the substrate and of a height selected such that the spacer layer can support a surface adjacent the substrate and spanning the cured set of droplets at a position spaced apart from the functional pattern,
- wherein the set of spacers comprises:
- a first set of cured droplets, and
- a second set of cured droplets deposited atop the first set of cured droplets such that each droplet of the second set of droplets is respectively supported directly atop a droplet of the first set of droplets, and
- wherein a first number of droplets in the first set of cured droplets is unequal to a second number of droplets in the second set of cured droplets such that the height of the spacer layer is variable.
Dependencies are inferred from the claim text.