US 10,379,333 B2 · Imaging apparatus and methods

Abstract

An apparatus for imaging a feature within a specimen is provided. According to one implementation the apparatus includes a substrate that is configured to support a specimen on an upper surface of the substrate so that the specimen resides over a hole that extends through the substrate. A heater is located vertically above the upper surface of the substrate. The heater is configured to heat the specimen when the specimen is supported on the substrate. An imaging device is located vertically below the lower surface of the substrate. The imaging device has an unobstructed line of sight to and through the hole in the substrate. The lower surface of the substrate is supported on a heat insulating platform in a manner that permits air to flow between the heat insulating platform and the lower surface of the substrate.

Claims23

Dependent claims

An apparatus for use in imaging a specimen, the apparatus comprising:

a substrate comprising an upper surface, a lower surface and a hole extending between and through the upper and lower surfaces, the upper surface having a zone that at least partially circumscribes the hole that is configured to support the specimen over the hole, the zone is at least partially surrounded by a recess in the upper surface of the substrate;
and
a heat insulating platform including an upper surface, a lower surface and a through opening extending through the upper and lower surfaces, at least a portion of the lower surface of the substrate being supported on the heat insulating platform in a manner that permits air to flow between the heat insulating platform and the substrate, the through opening providing an unobstructed line of sight to and through the hole in the substrate.

A method of imaging a feature located within a specimen, the method comprising:

placing the specimen on the upper surface of a substrate, the substrate having a lower surface and a hole extending between and through the upper and lower surfaces of the substrate, the specimen being positioned on the substrate so that the feature resides over the hole,
positioning an imaging device vertically below the lower surface of the substrate so that an unobstructed line of sight exists between the imaging device and the feature
heating the specimen to different temperatures and obtaining an image of the feature with the imaging device at the different temperatures;
and
maintaining an average air temperature between the imaging device and the lower surface of the substrate substantially constant while the specimen is being heated, the average air temperature between the imaging device and the lower surface of the substrate being maintained substantially constant by forcing an air flow in an area between the imaging device and the lower surface of the substrate.

2 more elements

Dependencies are inferred from the claim text.

Imaging apparatus and methods

Life of this patent

Imaging apparatus and methods

Life of this patent

Abstract

Claims23